Titanium-nickel shape memory alloy (SMA) has good biomedical application value as an implant. Alloy corrosion will promote the release of toxic nickel ions and cause allergies and poisoning of cells and tissues. With this background, surface modification of TiNi SMAs using TiC-powder-assisted micro-electrical discharge machining (EDM) was proposed. This aims to explore the effect of the electrical discharge machining (EDM) parameters and TiC powder concentration on the machining properties and surface characteristics of the TiNi SMA. It was found that the material removal rate (MRR), surface roughness, and thickness of the recast layer increased with an increase in the discharge energy. TiC powder’s addition had a positive effect on increasing the electro-discharge frequency and MRR, reducing the surface roughness, and the maximum MRR and the minimum surface roughness occurred at a mixed powder concentration of 5 g/L. Moreover, the recast layer had good adhesion and high hardness due to metallurgical bonding. XRD analysis found that the machined surface contains CuO₂, TiO₂, and TiC phases, contributing to an increase in the surface microhardness from 258.5 to 438.7 HV, which could be beneficial for wear resistance in biomedical orthodontic applications.

Focused-ion-beam chemical vapour deposition (FIB-CVD) has been repeatedly proved to be a useful tool for the growth of three-dimensional (3D) micro- and nano-structures. The strategy of real-time feedback control on FIB-CVD was previously proposed and experimentally demonstrated to be effective for growing ultra-long horizontal nanocantilevers. To fabricate various nanoelectromechanical systems that consist of such types of nanocantilever structures, the mechanical characteristics of ultra-long horizontal nanocantilevers should be investigated. In this study, nanocantilevers with an overhang length of up to 35 μm were grown by using a 30 kV Ga⁺ FIB, a beam current of 0.50 pA and phenanthrene (C₁₄H₁₀) as the gas source to deposit a diamond-like carbon structure. The Young's modulus of each nanocantilever was measured by bending the nanocantilever with a nanopillar whose Young's modulus was known. The average density of each nanocantilever was calculated from the Young's modulus and the measured resonant frequency. We found that the mechanical characteristics of each nanocantilever depended on the length of the nanocantilever if the strategy of real-time feedback control was applied in fabrication. The Young's moduli and the averaged densities of the nanocantilevers with a length of 11 to 34 μm were found to be 86 to 254 GPa and 1950 to 5750 kg m⁻³, respectively. With the increase of the overhang length, the Young's modulus and the average density were found to gradually increase.