This paper uses an ultrasonic vibration-integrated array electrode for 301 stainless steel micro-hole drilling. The influence of machining parameters such as ultrasonic vibration amplitude, working voltage, pulse-off time and electrode feed rate on different processing characteristics are discussed. The experimental results show that the ultrasonic-assisted electrode array vibrating generates a periodic pressure difference for the electrolyte. The periodic pressure difference forms a pumping effect and a cavitation effect. The two effects can effectively renew the electrolyte in the machining gap and discharge the reaction product, gas and reaction heat from the gap. Machining speed can be increased by over 500% when the ultrasonic amplitude increases from 0.94 μm to 2.87 μm. Micro-hole drilling with the optimum experimental parameter combination of ultrasonic amplitude 2.87 μm, working voltage 11 V, pulse-off time 50 μs and electrode feed rate 5 μm/s can result in a minimum average diagonal length and a smaller amount of variation in diagonal length. It also improves the inlet and outlet taper angle of micro-holes.

In this study, a concentration monitoring system was successfully developed. A sensor was immersed in electrical discharge machining oil, and the capacitance of the sensor changed as a function of the impurity concentration. Thus, DC voltage variations were produced via a conversion circuit. Carbon black and iron particles with different concentrations were successfully characterized. The capacitance increments were positively correlated with the particle concentration. The linear fitting results based on the impurity concentration were used to express the degree of influence of particles with different weight percentage concentrations on the increase in the overall capacitance value. An equivalent medium theory model was then developed according to the electrical characteristics of the impurities to predict different particle volume percentages.

Magnetic abrasive finishing (MAF) is a fast, high efficiency and high-precision polishing method on the surface machining of the metals. Furthermore, MAF also can be utilized to polish the stainless tubes in industrial applications; however, stainless tubes are often a non-magnetic material that makes it difficult for the magnetic field line to penetrate into the stainless tubes, thus reducing the magnetic forces in the inner tubes polishing. That is why stainless tubes are not easy to finish using traditional MAF. Therefore, magnetic finishing with gel abrasive (MFGA) applies gels mixed with steel grit and abrasives that were developed to improve the polishing efficiency and surface uniformity of the steel elements. In this study, a guar gum or silicone gel mixed with steel grit and silicon carbides are used as the magnetic abrasive gel to polish the stainless inner tubes. A DC motor was used to control the rotation speed of the chuck and an AC induction motor connected with an eccentric cam to produce the reciprocating motion of the workpiece were utilized to finish the inner surface of stainless tubes in the polishing process. The parameters of abrasive concentration, abrasive particle sizes, rotation speeds of motor and electric currents were used to investigate the surface roughness and the removal of materials from the stainless tubes. The experimental results showed that since guar gum had better fluidity than the silicone gel did, guar gum created excellent polishing efficiency in MFGA. Furthermore, the surface roughness of the stainless tube decreased from 0.646 μm Ra to below 0.056 μm Ra after processing for 30 min with the parameters of current 3A, gel abrasive with guar gum, rotational speed 1300 rpm and vibration frequency 4 Hz.

The micro-hole machining of quartz wafers depends on photolithography techniques akin to those used in semiconductor fabrication. These methods present challenges due to high equipment setup costs, large space requirements, and environmental pollution risks. This research applies ultrasonic vibration assistance in electrochemical discharge machining to create an array of micro-holes on quartz wafers. In the experiments, a self-prepared tungsten carbide micro-electrode array served as the tool electrode. This electrode was a 2 × 2 square array, with needles measuring 30 × 30 μm. A series of experiments was conducted to investigate the effects of various machining parameters, including working voltage, feed rate, duration time, duty factor, and ultrasonic power level, on the characteristics of the micro-hole array. The characteristics included average hole diameter and through-hole surface morphology. The experimental objective was to achieve a through-hole diameter of 80 μm with an accuracy of ±8 μm. During the electrochemical discharge machining, suitable ultrasonic vibrations can thin the insulating gas film coating on the electrode surface, resulting in a more uniform gas film. As the insulating gas film’s thickness decreased, so did the critical voltage needed for the electrochemical discharge machining, reducing the hole’s diameter expansion. The ultrasonic vibration assistance can enable the satisfaction of the dimensional accuracy requirement. The experimental results indicate that ultrasonic vibration assistance can effectively improve the processing capacity and reduce sample fragmentation. A working voltage of 44 V, feed rate of 1 μm/6 s, duration time of 30 μs, duty factor of 30%, and ultrasonic power level of 1 resulted in better inlet and outlet surface morphology without outlet fragmentation. Moreover, the average diameters of the inlet and outlet were roughly 80 μm while meeting the through-hole diameter of 80 μm with accuracy of ±8 μm.

Fe-based metallic glass possesses high hardness and brittleness. It is a hard-to-cut metal material and difficult to machine by conventional methods. Although electrical discharge machining (EDM) has advantages in machining hard-to-cut metal materials, recast layer, pores, and micro cracks will form on the machined surface after machining. The study used a helical tool for the micro electrical discharge drilling (µ-EDD) process on Fe-based metallic glass. The influence of processing parameters, including the pulse on time, gap voltage, duty factor, and spindle rotational speed on the micro hole machining quality characteristics was investigated. The helical tool with SiC electrophoretic deposited (EPD) film was used to polish the inner surface of the electrical discharged micro hole. The findings show that the best micro hole accuracy, tool wear length, and inner surface were obtained at the spindle rotation speed of 1150 rpm, pulse on time of 5 μs, gap voltage of 30 V, and duty factor of 40%. The inner surface roughness can be reduced to 0.018 µm by using EPD tool. The inner surface was polished up to form a mirror surface.