Traditional silicon-based micro-electro-mechanical system (MEMS) safety and arming devices, such as electro-thermal and electrostatically driven MEMS safety and arming devices, experience problems of high insecurity and require high voltage drive. For the current electromagnetic drive mode, the electromagnetic drive device is too large to be integrated. In order to address this problem, we present a new micro electromagnetically driven MEMS safety and arming device, in which the electromagnetic coil is small in size, with a large electromagnetic force. We firstly designed and calculated the geometric structure of the electromagnetic coil, and analyzed the model using COMSOL multiphysics field simulation software. The resulting error between the theoretical calculation and the simulation of the mechanical and electrical properties of the electromagnetic coil was less than 2% under the same size. We then carried out a parametric simulation of the electromagnetic coil, and combined it with the actual processing capacity to obtain the optimized structure of the electromagnetic coil. Finally, the electromagnetic coil was processed by deep silicon etching and the MEMS casting process. The actual electromagnetic force of the electromagnetic coil was measured on a micro-mechanical test system, compared with the simulation, and the comparison results were analyzed.

With the demand for high-safety, high-integration, and lightweight micro- and nano-electronic components, an MEMS electromagnetic energy-releasing component was innovatively designed based on the corona discharge theory. The device subverted the traditional device-level protection method for electromagnetic energy, realizing the innovation of adding a complex circuit system to the integrated chip through micro-nanometer processing technology and enhancing the chip’s size from the centimeter level to the micron level. In this paper, the working performance of the MEMS electromagnetic energy-releasing component was verified through a combination of a simulation, a static experiment, and a dynamic test, and a characterization test of the tested MEMS electromagnetic energy-releasing component was carried out to thoroughly analyze the effect of the MEMS electromagnetic energy-releasing component. The results showed that after the strong electromagnetic pulse injection, the pulse breakdown voltage of the MEMS electromagnetic energy-releasing component increased exponentially in terms of the pulse injection voltage, and the residual pulse current decreased significantly from one-third to one-half of the original, representing a significant protective effect. In a DC environment, the breakdown voltage of the needle–needle structure of the MEMS electromagnetic energy-releasing component was 144 V, and the on-time was about 0.5 ms.