Traditional silicon-based micro-electro-mechanical system (MEMS) safety and arming devices, such as electro-thermal and electrostatically driven MEMS safety and arming devices, experience problems of high insecurity and require high voltage drive. For the current electromagnetic drive mode, the electromagnetic drive device is too large to be integrated. In order to address this problem, we present a new micro electromagnetically driven MEMS safety and arming device, in which the electromagnetic coil is small in size, with a large electromagnetic force. We firstly designed and calculated the geometric structure of the electromagnetic coil, and analyzed the model using COMSOL multiphysics field simulation software. The resulting error between the theoretical calculation and the simulation of the mechanical and electrical properties of the electromagnetic coil was less than 2% under the same size. We then carried out a parametric simulation of the electromagnetic coil, and combined it with the actual processing capacity to obtain the optimized structure of the electromagnetic coil. Finally, the electromagnetic coil was processed by deep silicon etching and the MEMS casting process. The actual electromagnetic force of the electromagnetic coil was measured on a micro-mechanical test system, compared with the simulation, and the comparison results were analyzed.

Detonation waves released by energetic materials provide an important means of physical self-destruction (Psd) for information storage chips (ISCs) in the information insurance field and offer advantages that include a rapid response and low driving energy. The high electrical sensitivity of energetic materials means that they are easily triggered by leakage currents and electrostatic forces. Therefore, a Psd module based on a graphene-based insurance actuator heterogeneously integrated with energetic materials is proposed. First, the force–balance relation between the electrostatic van der Waals force and the elastic recovery force of the insurance actuator’s graphene electrode is established to realize physical isolation and an electrical interconnection between the energetic materials and the peripheral electrical systems. Second, a numerical analysis of the detonation wave stress of the energetic materials in the air domain is performed, and the copper azide dosage required to achieve reliable ISC Psd is obtained. Third, the insurance actuator is prepared via graphene thin film processing and copper azide is prepared via an in situ reaction. The experimental results show that the energetic materials proposed can release physical isolation within 14 μs and can achieve ISC Psd under the application of a voltage signal (4.4–4.65 V). Copper azide (0.45–0.52 mg) can achieve physical damage over an ISC area (23.37–35.84 mm²) within an assembly gap (0.05–0.25 mm) between copper azide and ISC. The proposed method has high applicability for information insurance.

Implantable drug-delivery microsystems have the capacity to locally meet therapeutic requirements by maximizing local drug efficacy and minimizing potential side effects. The internal organs of the human body including the esophagus, gastrointestinal tract, and respiratory tract, with anfractuos contours, all manifest with endoluminal lesions often located in a curved or zigzag area. The ability of localized drug delivery for these organs using existing therapeutic modalities is limited. Spraying a drug onto these areas and using the adhesion and water absorption properties of the drug powder to attach to lesion areas can provide effective treatment. This study aimed to report the development and application of microsystems based on microshockwave delivery of drugs. The devices comprised a warhead-like shell with a powder placed at the head of the device and a flexible rod that could be inserted at the tail. These devices had the capacity to deposit drugs on mucous membranes in curved or zigzag areas of organs in the body. The explosive impact characteristics of the device during drug delivery were analyzed by numerical simulation. In the experiment of drug delivery in pig intestines, we described the biosafety and drug delivery capacity of the system. We anticipate that such microsystems could be applied to a range of endoluminal diseases in curved or zigzag regions of the human body while maximizing the on-target effects of drugs.

A silicon-based micro-electro-mechanical systems (MEMS) safety and arming (S&A) device is presented, which exhibits high precision and reliability and is based on an integrated design concept. The threshold-value judging mechanism, which is a key component of the MEMS S&A device, was designed and fabricated by a silicon process. The threshold-value judging mechanism was studied via cantilever beam theory and verified by simulation and experimental methods. The experimental results show that when the centrifugal acceleration exceeds 52 320 g, the threshold-value judging mechanism initiates arming. The measured g -value for fracture of 52 320 g differs by 3.2% from the mathematical analysis and by 8.4% from the finite-element analysis results obtained herein. Therefore, the results obtained experimentally, by simulation and theoretically, are consistent, and indicate that the threshold-value judging mechanism meets the expected criteria. Furthermore, because of the fragile characteristics of silicon, the feasibility of the silicon-based structure as a functional component in the MEMS S&A device is confirmed.