Incipient plasticity in multi-principal element alloys, CoCrNi, CoCrFeMnNi, and Al_0.1CoCrFeNi was evaluated by nano-indentation and compared with pure Ni. The tests were performed at a loading rate of 70 μN/s in the temperature range of 298 K to 473 K. The activation energy and activation volume were determined using a statistical approach of analyzing the “pop-in” load marking incipient plasticity. The CoCrFeMnNi and Al_0.1CoCrFeNi multi-principal element alloys showed two times higher activation volume and energy compared to CoCrNi and pure Ni, suggesting complex cooperative motion of atoms for deformation in the five component systems. The small calculated values of activation energy and activation volume indicate heterogeneous dislocation nucleation at point defects like vacancy and hot-spot.