The demand for waterproofing of polymer (parylene) coating encapsulation has increased in a wide variety of applications, especially in the waterproof protection of electronic devices. However, parylene coatings often produce pinholes and cracks, which will reduce the waterproof effect as a protective barrier. This characteristic has a more significant influence on sensors and actuators with movable parts. Thus, a defect filling method of micro-nano composite structure is proposed to improve the waterproof ability of parylene coatings. The defect filling method is composed of a nano layer of Al₂O₃ molecules and a micro layer of parylene polymer. Based on the diffusion mechanism of water molecules in the polymer membrane, defects on the surface of polymer encapsulation will be filled and decomposed into smaller areas by Al₂O₃ nanoparticles to delay or hinder the penetration of water molecules. Accordingly, the dense Al₂O₃ nanoparticles are utilized to fill and repair the surface of the organic polymer by low-rate atomic layer deposition. This paper takes the pressure sensor as an example to carry out the corresponding research. Experimental results show that the proposed method is very effective and the encapsulated sensors work properly in a saline solution after a period of time equivalent to 153.9 days in body temperature, maintaining their accuracy and precision of 2 mmHg. Moreover, the sensors could improve accuracy by about 43% after the proposed encapsulation. Therefore, the water molecule anti-permeability encapsulation would have broad application prospects in micro/nano-device protection.

Hydroxyapatite (HAP) has excellent biocompatibility with living bone tissue and does not cause defensive body reactions, therefore, it has become one of the most widely used calcium phosphate materials in dental and medical fields. However, its poor mechanical properties have been a substantial challenge in the application of HAP for the replacement of load-bearing or large bone defects. Laminated HAP–45S5 bioglass ceramics composites were prepared by the spark plasma sintering (SPS) technique. The interface structures between the HAP and 45S5 bioglass layers and the mechanical properties of the laminated composites were investigated. It was demonstrated that there was mutual transfer and exchange of Ca and Na atoms at the interface between 45S5 bioglass/HAP laminated layers, which contributed considerably to the interfacial bonding. Due from the laminated structure and strong interface bonding, laminated HAP–45S5 bioglass is recommended for structural applications.

The demand for high-accuracy pressure sensors has increased with the advancement of technology in a wide variety of applications. However, it is generally difficult and expensive to improve the accuracy of the pressure sensor because it usually depends on the sensing principle and the internal physical structure of the pressure sensor, varying with its material and production process. Thus, a simple, low-cost, and generally applied post-processing method is proposed to improve the accuracy of pressure sensors. In this method, a micro-coating is cladded on the surface of the sensor, which effectively isolates the adverse effect of the external environment, similar to applying a “micro-protective clothing” on the pressure sensor. Experiments on seven pressure sensors are conducted, in which the micron-thin parylene polymer is utilized as the surface-deposited coating layer to demonstrate the improvement of accuracy. Results show that the accuracy was improved, with an average increase of approximately 62.54% than before cladding, while the sensitivity was almost unchanged. The principle of improving the accuracy of this method was also analyzed. The proposed simple, efficient, and low-cost method of cladding micro-coating for enhancing the accuracy of sensors can be widely applied in various fields of industrial automatic control.