Yufeng Jin received a Ph.D. degree in physical and optical-electronics engineering from Southeast University, China, in 1999. Since then, he was a Post-Doctoral Fellow, an Associate Professor, and a Professor with Peking University. He has directed the National Key Laboratory of Science and Technology on Micro/Nano Fabrication since 2005. His research interests focus on MEMS sensors and TSV-related 3D integration of microsystems and their application systems.