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Yufeng Jin

Prof. Dr. Yufeng Jin

National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Pek...

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Yufeng Jin received a Ph.D. degree in physical and optical-electronics engineering from Southeast University, China, in 1999. Since then, he was a Post-Doctoral Fellow, an Associate Professor, and a Professor with Peking University. He has directed the National Key Laboratory of Science and Technology on Micro/Nano Fabrication since 2005. His research interests focus on MEMS sensors and TSV-related 3D integration of microsystems and their application systems.

Research Keywords & Expertise

MEMS sensors
Micro/Nano fabrication
TSV related 3D integra...

Short Biography

Yufeng Jin received a Ph.D. degree in physical and optical-electronics engineering from Southeast University, China, in 1999. Since then, he was a Post-Doctoral Fellow, an Associate Professor, and a Professor with Peking University. He has directed the National Key Laboratory of Science and Technology on Micro/Nano Fabrication since 2005. His research interests focus on MEMS sensors and TSV-related 3D integration of microsystems and their application systems.

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