Graphene oxide (GO) is a promising candidate for humidity sensing, and the uniformity and thickness of GO films are important for the reproducibility and test signal strength of humidity sensors. In this paper, uniform and thickness-controllable GO films are first formed by the surface tension of different concentrations of GO solution and then transferred to surface acoustic wave (SAW) humidity sensors. This GO film formation and transfer process has very good repeatability and stability, as evidenced by the humidity response of the sensors. With the help of the uniform and highly oxidized GO film, the humidity sensors show a significantly high sensitivity (absolute sensitivity of 25.3 kHz/%RH and relative sensitivity of 111.7 p.p.m./%RH) in a wide test range from 10%RH to 90%RH with very little hysteresis (<1%RH). The sensors achieve good reversibility, excellent short-term repeatability and stability. Moreover, the humidity sensors also show a fast response and recovery time of <10 s.

Flexible and wearable acoustic wave technology has recently attracted tremendous attention due to their wide-range applications in wearable electronics, sensing, acoustofluidics, and lab-on-a-chip, attributed to its advantages such as low power consumption, small size, easy fabrication, and passive/wireless capabilities. Great effort has recently been made in technology development, fabrication, and characterization of rationally designed structures for next-generation acoustic wave based flexible electronics. Herein, advances in fundamental principles, design, fabrication, and applications of flexible and wearable acoustic wave devices are reviewed. Challenges in material selections (including both flexible substrate and piezoelectric film) and structural designs for high-performance flexible and wearable acoustic wave devices are discussed. Recent advances in fabrication strategies, wave mode theory, working mechanisms, bending behavior, and performance/evaluation are reviewed. Key applications in wearable and flexible sensors and acoustofluidics, as well as lab-on-a-chip systems, are discussed. Finally, major challenges and future perspectives in this field are highlighted.

This paper presents a high accuracy air-coupled reflective ultrasonic rangefinder based on piezoelectric micromachined ultrasonic transducers (pMUTs) using multi-frequency continuous waves (MFCWs). Two pieces of 5 times 5 AlN pMUTs arrays at the resonant frequency of 492 kHz are employed to transmit and receive ultrasonic signals, respectively. The MFCW method, where the distance information is calculated from the phase difference, can cancel out the random noise in numerous repeating periods. Therefore, high-accuracy range measurement is achieved. The 3σ accuracy of the short distance measurement (< 100 mm) is 0.0711 mm with 0.096 mm/° first-order resolution and 1.934 μm/° second-order resolution. For long distance measurement (100-300 mm), the 3σ accuracy is 1.8208 mm with 0.481 mm/° first-order resolution and 1.954 μm/° second-order resolution. The MFCW-based rangefinder using pMUTs is a good candidate for short distance measurement with high accuracy. [2018-0267]

Flexible and wearable sensors are highly desired for health monitoring, agriculture, sport, and indoor positioning systems applications. However, the currently developed wireless wearable sensors, which are communicated through radio signals, can only provide limited positioning accuracy and are often ineffective in underwater conditions. In this paper, a wireless platform based on flexible piezoelectric acoustics is developed with multiple functions of sensing, communication, and positioning. Under a high frequency (≈13 MHz) stimulation, Lamb waves are generated for respiratory monitoring. Whereas under low‐frequency stimulation (≈20 kHz), this device is agitated as a vibrating membrane, which can be implemented for communication and positioning applications. Indoor communication is demonstrated within 2.8 m at 200 bps or 4.2 m at 25 bps. In combination with the sensing function, real‐time respiratory monitoring and wireless communication are achieved simultaneously. The distance measurement is achieved based on the phase differences of transmitted and received acoustic signals within a range of 100 cm, with a maximum error of 3 cm. This study offers new insights into the communication and positioning applications using flexible acoustic wave devices, which are promising for wireless and wearable sensor networks.