Exciting concepts are under development for flagship, probe class, explorer class, and suborbital class NASA missions in the ultraviolet/optical spectral range. These missions will depend on high-performance silicon detector arrays being delivered affordably and in high numbers. To that end, we have advanced delta-doping technology to high-throughput and high-yield wafer-scale processing, encompassing a multitude of state-of-the-art silicon-based detector formats and designs. We have embarked on a number of field observations, instrument integrations, and independent evaluations of delta-doped arrays. We present recent data and innovations from JPL’s Advanced Detectors and Systems Program, including two-dimensional doping technology, JPL’s end-to-end postfabrication processing of high-performance UV/optical/NIR arrays and advanced coatings for detectors. While this paper is primarily intended to provide an overview of past work, developments are identified and discussed throughout. Additionally, we present examples of past, in-progress, and planned observations and deployments of delta-doped arrays.

Ultraviolet (UV) studies in astronomy, cosmology, planetary studies, biological and medical applications often require precision detection of faint objects and in many cases require photon-counting detection. We present an overview of two approaches for achieving photon counting in the UV. The first approach involves UV enhancement of photon-counting silicon detectors, including electron multiplying charge-coupled devices and avalanche photodiodes. The approach used here employs molecular beam epitaxy for delta doping and superlattice doping for surface passivation and high UV quantum efficiency. Additional UV enhancements include antireflection (AR) and solar-blind UV bandpass coatings prepared by atomic layer deposition. Quantum efficiency (QE) measurements show QE > 50% in the 100–300 nm range for detectors with simple AR coatings, and QE ≅ 80% at ~206 nm has been shown when more complex AR coatings are used. The second approach is based on avalanche photodiodes in III-nitride materials with high QE and intrinsic solar blindness.

Metallic aluminum mirrors remain the best choice for high reflectance applications at ultraviolet wavelengths (90 to 320 nm) and maintain good performance through optical and infrared wavelengths. Transparent protective coatings are required to prevent the formation of an oxide layer, which severely degrades reflectance at wavelengths below 250 nm. We report on the development of atomic layer deposition (ALD) processes for thin protective films of aluminum fluoride that are viable for application at substrate temperatures $<200°C$. Reflectance measurements of aluminum films evaporated in ultrahigh vacuum conditions, and protected mirrors encapsulated with ALD $AlF3$ are used to evaluate the far ultraviolet (90 to 190 nm) and near ultraviolet (190 to 320 nm) performance of both the ALD material and the underlying metal. Optical modeling is used to predict the performance of optimized structures for future astronomical mirror applications.

We report on multilayer high efficiency antireflection coating (ARC) design and development for use at UV wavelengths on CCDs and other Si-based detectors. We have previously demonstrated a set of single-layer coatings, which achieve $>50%$ quantum efficiency (QE) in four bands from 130 to 300 nm. We now present multilayer coating designs that significantly outperform our previous work between 195 and 215 nm. Using up to 11 layers, we present several model designs to reach QE above 80%. We also demonstrate the successful performance of 5 and 11 layer ARCs on silicon and fused silica substrates. Finally, we present a five-layer coating deposited onto a thinned, delta-doped CCD and demonstrate external QE greater than 60% between 202 and 208 nm, with a peak of 67.6% at 206 nm.

<!-- *** Custom HTML *** --> We present the status of on-going detector development efforts for our joint NASA/Centre National d’Études Spatiales balloon-borne UV multiobject spectrograph, the Faint Intergalactic Redshifted Emission Balloon (FIREBall-2; FB-2). FB-2 demonstrates a UV detector technology, the delta-doped electron-multiplying CCD (EMCCD), in a low-risk suborbital environment, to prove the performance of EMCCDs for future space missions and technology readiness level advancement. EMCCDs can be used in photon-counting mode to achieve extremely low readout noise (<1 electron). Our testing has focused on reducing clock-induced-charge (CIC) through wave shaping and well-depth optimization with a Nüvü V2 CCCP controller, measuring CIC at 0.001 e⁻ / pixel / frame. This optimization also includes methods for reducing dark current, via cooling, and substrate voltage levels. We discuss the challenges of removing cosmic rays, which are also amplified by these detectors, as well as a data reduction pipeline designed for our noise measurement objectives. FB-2 flew in 2018, providing the first time an EMCCD, was used for UV observations in the stratosphere. FB-2 is currently being built up to fly again in 2020, and improvements are being made to the EMCCD to continue optimizing its performance for better noise control.