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Dr. Daisuke Yamane
Department of Mechanical Engineering, Ritsumeikan University, 1-1-1 Noji-Higashi, Kusatsu 525-8577, Shiga, Japan

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0 Microfabrication
0 Mems sensor
0 Inertial Sensor
0 RF-MEMS
0 CMOS-MEMS

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Journal article
Published: 08 April 2021 in Electrochem
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Ti/Au multi-layered micro-cantilevers with complex three-dimensional structures used as micro-components in micro-electromechanical systems (MEMS) sensors were prepared by lithography and electrodeposition, and the effective Young’s modulus was evaluated by the resonance frequency method and finite element method simulation. Effects of the constraint condition at the fixed-end of the micro-cantilever and the temperature dependency of the effective Young’s modulus were studied. Three types of the constraint at the fixed-end were prepared, which were normal type (constraining only bottom surface of the fixed-end), block type (constraining both top and bottom surfaces), and bridge type (top surfaces covering with a bridge-like structure). The temperature dependency test was conducted in a temperature range from 150 to 300 °C in a vacuum chamber. An increase in the effective Young’s modulus was observed as the constraint condition became more rigid, and the effective Young’s modulus merely changed as the temperature varied from room temperature to 300 °C.

ACS Style

Hitomi Watanabe; Tso-Fu Chang; Michael Schneider; Ulrich Schmid; Chun-Yi Chen; Shinichi Iida; Daisuke Yamane; Hiroyuki Ito; Katsuyuki Machida; Kazuya Masu; Masato Sone. Effective Young’s Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electrodeposition and the Temperature Dependency. Electrochem 2021, 2, 216 -223.

AMA Style

Hitomi Watanabe, Tso-Fu Chang, Michael Schneider, Ulrich Schmid, Chun-Yi Chen, Shinichi Iida, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone. Effective Young’s Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electrodeposition and the Temperature Dependency. Electrochem. 2021; 2 (2):216-223.

Chicago/Turabian Style

Hitomi Watanabe; Tso-Fu Chang; Michael Schneider; Ulrich Schmid; Chun-Yi Chen; Shinichi Iida; Daisuke Yamane; Hiroyuki Ito; Katsuyuki Machida; Kazuya Masu; Masato Sone. 2021. "Effective Young’s Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electrodeposition and the Temperature Dependency." Electrochem 2, no. 2: 216-223.

Journal article
Published: 24 December 2020 in Electrochem
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Nanocrystalline Ni-Co alloy deposits with grain sizes less than 30 nm were produced by electrodeposition with a direct current in a sulfamate bath. Surfaces of the Ni-Co alloy deposits showed granular morphology. The size of the granular particles and the Co content decreased when a lower current density was applied. Addition of NiBr2 and a surface brightener (NSF-E) into the bath resulted in the grain refinement effect and an increase of Co content in the deposit. The grain size reached roughly 14 nm and 60 at.% of Co content in Ni-Co alloys electrodeposited with the bath containing the two additives. Ni-Co alloys obtained in this study showed higher microhardnesses than those of pure Ni and Co deposits prepared under the same condition, which revealed the solid solution strengthening effect. With a decrease in the grain size, the microhardness further increased, and this trend followed the Hall–Petch relationship well. The maximum microhardness value of 862.2 Hv was obtained owing to both the grain boundary and solid solution strengthening effects.

ACS Style

Yiming Jiang; Chun-Yi Chen; Tso-Fu Mark Chang; Xun Luo; Daisuke Yamane; Masato Sone. Electrodeposition of Ni-Co Alloys and Their Mechanical Properties by Micro-Vickers Hardness Test. Electrochem 2020, 2, 1 -9.

AMA Style

Yiming Jiang, Chun-Yi Chen, Tso-Fu Mark Chang, Xun Luo, Daisuke Yamane, Masato Sone. Electrodeposition of Ni-Co Alloys and Their Mechanical Properties by Micro-Vickers Hardness Test. Electrochem. 2020; 2 (1):1-9.

Chicago/Turabian Style

Yiming Jiang; Chun-Yi Chen; Tso-Fu Mark Chang; Xun Luo; Daisuke Yamane; Masato Sone. 2020. "Electrodeposition of Ni-Co Alloys and Their Mechanical Properties by Micro-Vickers Hardness Test." Electrochem 2, no. 1: 1-9.

Journal article
Published: 01 November 2020 in Electrochem
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Strengthening of electrodeposited Au-based materials is achieved by co-electrodeposition with TiO2 nanoparticles dispersed in a sulfide-based gold electrolyte. TiO2 content in the composite film is adjusted by concentration of the TiO2 in the gold electrolyte. Effects of the TiO2 content on surface morphology, crystalline structure and microstructure of the composite film are investigated. Mechanical properties of the Au–TiO2 composite films are evaluated by micro-Vickers hardness and micro-compression tests. The hardness increases from 135 to 207 HV when the TiO2 content is increased from 0 to 2.72 wt%. Specimens used in the micro-compression test are micro-pillars fabricated from the composite film, and the yield strength reaches 0.84 GPa by incorporating 2.72 wt% TiO2 into the film.

ACS Style

Yu-An Chien; Tso-Fu Mark Chang; Chun-Yi Chen; Daisuke Yamane; Hiroyuki Ito; Katsuyuki Machida; Kazuya Masu; Masato Sone. Co-Electrodeposition of Au–TiO2 Nanocomposite and the Micro-Mechanical Properties. Electrochem 2020, 1, 388 -393.

AMA Style

Yu-An Chien, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone. Co-Electrodeposition of Au–TiO2 Nanocomposite and the Micro-Mechanical Properties. Electrochem. 2020; 1 (4):388-393.

Chicago/Turabian Style

Yu-An Chien; Tso-Fu Mark Chang; Chun-Yi Chen; Daisuke Yamane; Hiroyuki Ito; Katsuyuki Machida; Kazuya Masu; Masato Sone. 2020. "Co-Electrodeposition of Au–TiO2 Nanocomposite and the Micro-Mechanical Properties." Electrochem 1, no. 4: 388-393.