Optomechanical sensing based on the coupling between mechanical motions and optical resonances has attracted huge interest in sensor applications due to its small footprint, high sensitivity, low detection limit, and electromagnetic immunity. Optomechanical sensors that detect from mechanical motion at µm scale to molecular vibration at nm scale have found various applications such as force, inertia, acoustic, chemical, and thermal sensing, etc. In this review, we provide an overview of the recent progress of optomechanical sensors. Three development fields of optomechanical sensors are reviewed, which are passive optomechanical sensors, electro-optomechanical sensing platforms, and molecular vibration sensing schemes. The sensor configurations, applications, and integrations are described. In the end, we also provide our perspectives on the future development directions of optomechanical sensors.

With the development of silicon photonics, dense photonic integrated circuits play a significant role in applications such as light detection and ranging systems, photonic computing accelerators, miniaturized spectrometers, and so on. Recently, extensive research work has been carried out on the phase shifter, which acts as the fundamental building block in the photonic integrated circuit. In this review, we overview different types of silicon photonic phase shifters, including micro-electro-mechanical systems (MEMS), thermo-optics, and free-carrier depletion types, highlighting the MEMS-based ones. The major working principles of these phase shifters are introduced and analyzed. Additionally, the related works are summarized and compared. Moreover, some emerging applications utilizing phase shifters are introduced, such as neuromorphic computing systems, photonic accelerators, multi-purpose processing cores, etc. Finally, a discussion on each kind of phase shifter is given based on the figures of merit.

In recent years, there has been growing interest in optical sensors based on microcavities due to their advantages of size reduction and enhanced sensing capability. In this paper, we aim to give a comprehensive review of the field of photonic crystal nanobeam cavity-based sensors. The sensing principles and development of applications, such as refractive index sensing, nanoparticle sensing, optomechanical sensing, and temperature sensing, are summarized and highlighted. From the studies reported, it is demonstrated that photonic crystal nanobeam cavities, which provide excellent light confinement capability, ultra-small size, flexible on-chip design, and easy integration, offer promising platforms for a range of sensing applications.

The design, fabrication and characterization of a miniature adjustable-focus endoscope are reported. Such an endoscope consists of a solid tunable lens for optical power tuning, two slender piezoelectric benders for laterally moving the lens elements perpendicular to the optical axis, and an image fiber bundle for image transmission. Both optical and mechanical designs are presented in this paper. Dynamic tuning of optical powers from about 135 diopters to about 205 diopters is experimentally achieved from the solid tunable lens, which contains two freeform surfaces governed by 6-degree polynomials and optimized by ray tracing studies. Results show that there is no obvious distortion or blurring in the images obtained, and the recorded resolution of the lens reaches about 30 line pairs per mm. Three test targets located at various object distances of 20 mm, 50 mm and 150 mm are focused individually by the endoscope by applying different driving DC voltages to demonstrate its adjustable-focus capability.

A new class of hybrid systems that couple optical and mechanical nanoscale devices is under development. According to their interaction concepts, two groups of opto-mechanical systems are summarized as mechanically tunable and radiation pressure-driven optical resonators. On account of their high-quality factors and small mode volumes as well as good on-chip integrability with waveguides/circuits, photonic crystal (PhC) cavities have attracted great attention in sensing applications. Benefitting from the opto-mechanical interaction, a PhC cavity integrated opto-mechanical system provides an attractive platform for ultrasensitive sensors to detect displacement, mass, force, and acceleration. In this review, we introduce basic physical concepts of opto-mechanical PhC system and describe typical experimental systems for sensing applications. Opto-mechanical interaction-based PhC cavities offer unprecedented opportunities to develop lab-on-a-chip devices and witness a promising prospect to further manipulate light propagation in the nanophotonics.