The design, analytical modelling, finite element analysis (FEA), and experimental characterization of a microelectromechanical system (MEMS) out-of-plane (vertical) translational piezoelectric lead–zirconate–titanate (PZT) bimorph actuator supported on Archimedes' spiral tethers are presented. Three types of bimorph actuators with different electrode patterns (with spiral tethers half actuated, fully actuated with uniform polarity, or fully actuated with reversed polarity) are designed and modelled. The two actuators with the highest predicted performance (half actuated and fully actuated with uniform polarity) are implemented and characterized. Both designs are fabricated by commercial processes and are compatible with integration into more complex MEMS systems. Analytical modelling and FEA are used to analyze and predict the actuators' displacements and blocking forces. Experimental measurements of the deflections and blocking forces of actuators with full uniform actuation and half actuation validate the design. At an applied voltage of 110 V, the out-of-plane deflections of the actuators with half actuation and full uniform actuation are measured at about 17 µm and 29 µm respectively, in good agreement with analytical predictions of 17.3 µm and 34.2 µm and FEA predictions of 17.1 µm and 25.8 µm. The blocking force for devices with half-actuated tethers is predicted to be 12 mN (analytical) and 10 mN (FEA), close to the experimental value of 9 mN. The blocking force for devices with full uniform actuation is predicted to be 23 mN (analytical) and 17 mN (FEA), as compared with 15 mN in experiments.

The design, fabrication, and demonstration of a set of 2 mm², high-force actuators that combine piezoelectric in-plane actuators with MEMS-enabled scissor mechanisms (motion amplifiers) to simultaneously produce high out-of-plane forces and large out-of-plane displacements are presented. The microscissor motion amplifier employs two layers of lithographically-patterned SU-8 microstructure laminated with a thin film of structural polyimide and adhesive to form hinges. Performance is optimized by varying layer thickness and adhesive types. Measured displacements of >3 μm and measured forces of >5 mN are observed, corresponding to a displacement per unit area of 1.6 μm/mm² and a force per unit area of 2.6 mN/mm². Cyanoacrylate adhesive provides superior performance to silicone adhesive, with larger force output. Thicker polyimide hinges provide smaller displacement but greater force than thinner polyimide hinges. These powerful, compact actuators have significant potential for high-force applications like tactile displays and micropumps.

Modular microfluidics offer the opportunity to combine the precise fluid control, rapid sample processing, low sample and reagent volumes, and relatively lower cost of conventional microfluidics with the flexible reconfigurability needed to accommodate the requirements of target applications such as drug toxicity studies. However, combining the capabilities of fully adaptable modular microelectromechanical systems (MEMS) assembly with the simplicity of conventional microfluidic fabrication remains a challenge. A hybrid polydimethylsiloxane (PDMS)-molding/photolithographic process is demonstrated to rapidly fabricate LEGO^®-like modular blocks. The blocks are created with different sizes that interlock via tongue-and-groove joints in the plane and stack via interference fits out of the plane. These miniature strong but reversible connections have a measured resistance to in-plane and out-of-plane forces of up to >6000× and >1000× the weight of the block itself, respectively. The LEGO^®-like interference fits enable O-ring-free microfluidic connections that withstand internal fluid pressures of >120 kPa. A single layer of blocks is assembled into LEGO^®-like cell culture plates, where the in vitro biocompatibility and drug toxicity to lung epithelial adenocarcinoma cells and hepatocellular carcinoma cells cultured in the modular microwells are measured. A double-layer block structure is then assembled so that a microchannel formed at the interface between layers connects two microwells. Breast tumor cells and hepatocytes cultured in the coupled wells demonstrate interwell migration as well as the simultaneous effects of a single drug on the two cell types.

This paper presents the design and experimental characterization of a compact parallel-beam architecture for low-frequency energy harvesters that switch passively among dynamical modes to extend their operational range. Two beams interact to generate power; a driving beam couples into low frequency vibrations, and a higher frequency generating beam outputs power upon impact by the driving beam. The system switches between modes in which the driving beam bounces off the generating beam (coupled motion) and modes in which the driving beam passes the generating beam (plucked motion). The compact structure is realized by mounting the generating beam within a U-shaped driving beam on a single support. A flexible tip is mounted inside the driving beam's U shape to enable robust interactions. This new architecture reduces system volume by 80% compared with an earlier model that has the same resonance frequency, but it also changes the flexible tip's role in the contact dynamics. The flexible tip is experimentally tailored to optimize performance. The harvester generates power over the measured range of acceleration from 0.2 g to 2 g and driving frequency from 5 Hz to 20 Hz. With one tip design, the harvester offers peak power of 0.267 mW with plucked operation covering 32% of the tested range. With a second tip design, the harvester offers a lower peak power of 0.036 mW with plucked operation covering 73% of the tested range.

Small-scale, out-of-plane actuators can enable tactile interfaces; however, achieving sufficient actuator force and displacement can require larger actuators. In this work, 2-mm² out-of-plane microactuators were created, and were demonstrated to output up to 6.3 µm of displacement and 16 mN of blocking force at 170 V. The actuators converted in-plane force and displacement from a piezoelectric extensional actuator into out-of-plane force and displacement using robust, microelectromechanical systems (MEMS)-enabled, half-scissor amplifiers. The microscissors employed two layers of lithographically patterned SU-8 epoxy microstructures, laminated with a thin film of structural polyimide and adhesive to form compact flexural hinges that enabled the actuators’ small area. The self-aligned manufacture minimized assembly error and fabrication complexity. The scissor design dominated the actuators’ performance, and the effects of varying scissor angle, flexure thickness, and adhesive type were characterized to optimize the actuators’ output. Reducing the microscissor angle yielded the highest actuator performance, as it maximized the amplification of the half-scissor’s displacement and minimized scissor deformation under externally applied loads. The actuators’ simultaneously large displacements and blocking forces for their size were quantified by a high displacement-blocking force product per unit area of up to 50 mN·µm/mm². For a linear force–displacement relationship, this corresponds to a work done per unit area of 25 mN·µm/mm².