Wireless power transfer is one of the enabling technologies for powering implantable biomedical devices. Biocompatibility and CMOS compatibility of wireless power transfer devices are highly desired due to safety and footprint concerns. Toward implantable applications, this paper presents an ultrasound-induced wireless power supply based on AlN piezoelectric micromachined ultrasonic transducer (PMUT). The wireless power supply integrates wireless power transfer, power management and energy storage functions. The PMUT array is used as a passive wireless power receiver, followed by electrical impedance matching networks and a voltage multiplier for efficient power transmission and rectification. The output power intensity of the wireless receiver reaches 7.36 μW/mm²with an incident ultrasound power below the FDA safety limit. The output power of the wireless power supply reaches 18.8 μW and a 100-μF capacitor is fully charged to 3.19 V after power management, which are sufficient to power many low-power implantable biomedical devices such as for neural electrical stimulation, biosensors and intrabody communication applications. The wireless power supply is implemented in a PCB with a diameter of 1 cm. With biocompatibility and CMOS compatibility of AlN thin film compared to commonly used PZT, the proposed solution paves the way for safer and ultraminiaturized wireless power supplies with further development incorporating all the functions on a monolithic chip in the future.

Two-dimensional (2D) transition metal dichalcogenides (TMDCs) semiconducting materials have recently attracted wide attention and been regarded as promising building blocks for chemical sensors due to their high surface-to-volume ratio. However, their low response hinders the realization of high-performance 2D TMDCs chemical sensors. Here, we demonstrate the improvement of sensing performance of molybdenum ditelluride (MoTe₂) gas sensor through continuous light illumination. The dependence of sensing performance on the energy of photons and light intensity is systematically studied. The response to NH₃ is dramatically enhanced by more than 25 times under 254 nm ultraviolet (UV) light illumination with intensity of 2.5 mW/cm². Moreover, a remarkable low detection limit of 3 ppb is achieved, which is improved by 80 times compared with that in dark condition. The results demonstrate that light illumination is a promising method to improve the sensitivity of 2D TMDCs chemical sensors.