Macro–micro dual-drive technology uses a micro-drive system to compensate for motion errors of a macro-drive system, solving the contradiction between large travel and high-precision motion. Additionally, it has a wide range of applications in the ultra-precision field. Therefore, it is necessary to analyze and research the ultra-precision macro–micro dual-drive system. Firstly, this paper analyzes the history of ultra-precision technology development and summarizes the research status of ultra-precision technology processing and application. Secondly, the micro-drive mechanism design and macro–micro-drive mode of macro–micro dual-drive technology, which can solve the contradiction of large stroke and high precision, are reviewed, and the application of macro–micro dual-drive technology in an ultra-precision system is summarized. Finally, the challenges and development trends of the ultra-precision macro–micro dual-drive system are analyzed. The research in this paper will play an important role in promoting the development of the ultra-precision system and macro–micro dual-drive technology.

In the macro/micro dual-drive rotary system, the micro-drive system compensates for the position error of the macro-drive system. To realize the sub-arc-second (i.e., level of 1″–0.1″) positioning of the macro/micro dual-drive rotary system, it is necessary to study the positioning performance of the sub-arc-second micro-drive rotary system. In this paper, we designed a sub-arc-second micro-drive rotary system consisting of a PZT (piezoelectric actuator) and a micro rotary mechanism, and used simulation and experimental methods to study the positioning performance of the system. First, the micro-drive rotary system was developed to provide ultra-precise rotary motion. In this system, the PZT has ultrahigh resolution at a level of 0.1 nanometers in linear motion; a micro rotating mechanism was designed according to the composite motion principle of the flexible hinge, which could transform the linear motion of piezoelectric ceramics into rotating motion accurately. Second, the drive performance was analyzed based on the drive performance experiment. Third, kinematics, simulation, and experiments were carried out to analyze the transformation performance of the system. Finally, the positioning performance equation of the system was established based on the two performance equations, and the maximum rotary displacements and positioning error of the system were calculated. The study results showed that the system can provide precision motion at the sub-arc-second and good linearity of motion. This study has a certain reference value in ultra-precision positioning and micromachining for research on rotary motion systems at the sub-arc-second level.

A micro-drive system is a key part of macro-micro-drive technology and precision positioning technology in which a micro-drive reduction system can provide more precise motion and suitable small space motion. Therefore, it is necessary to study precision micro-drive reduction systems. In this paper, based on the design of a micro-drive reduction mechanism without force and displacement in non-motion direction, a precision micro-drive reduction system driven by a piezoelectric ceramic actuator (PZT) was designed, and the strength, dynamic and motion performance of the system was analyzed. First, based on the principle of a flexure hinge lever and the principle of balanced additional force, a type of precision micro-drive reduction mechanism with an adjustable reduction ratio was designed. Second, the strength performance of the system was analyzed by finite element analysis, and the dynamic performance of the system was analyzed by finite element analysis and experiments. Finally, the kinematic performance of the system was analyzed by theoretical analysis, the finite element method and experiment, and the motion linear equation was calculated based on the linear fitting equations of three methods. The study results showed that the system had good strength and dynamic performances, and the system’s motion had the advantages of high precision and good linearity. This research has certain reference value for the design and performance research of micro-drive mechanisms.

In this paper, a sub-arc-second macro/micro dual-drive rotary system is designed, and the continuous compensation of the system error and its experimental research are completed. First, the macro-drive system is driven by a direct-drive motor, and the micro-drive system uses a piezoelectric ceramic to drive the micro-drive rotary mechanism; the system uses a micro-drive system to compensate the motion error of the macro-drive system, and uses circular grating to feedback the displacement of the macro/micro total output turntable to form a macro/micro dual-drive closed-loop control system. Second, based on the establishment of the system error model, the design of the system’s continuous error compensation scheme is completed. Finally, the positioning accuracy testing of the system, direct error compensation of the macro-drive, manual error compensation of the macro-drive, error compensation performance of the micro-drive part and macro/micro compensation of the system are carried out in the study. The results show that the repeated positioning error and the positioning error of the system are reduced by 78.8% and 95.2%, respectively, after macro/micro compensation. The correctness and effectiveness of the designed system design, error compensation and control method are verified through performance tests, and its positioning accuracy is verified to the sub-arc-second (0.1 arcsecond) level. The research in this paper has important reference value for the development of ultra-precision macro/micro dual-drive technology.

In order to obtain motion with large travel and high precision, the micro-drive system is used to compensate for the motion error of the macro-drive system in the macro/micro dual-drive system. The research on the micro-drive rotary system lags behind the micro-drive linear system, so it is of great significance to study the designing and error compensation performance of a precision micro-drive rotary system. In this paper, a precision micro-drive rotary system is designed, the error compensation scheme of the system is proposed, and the system feasibility in design and error compensation is tested by FEM simulation analysis and performance experiments. Firstly, a precision micro-drive rotary system is designed to provide high-precision rotary motion, which consists of a micro rotary mechanism and PZT. In the system, the micro rotary mechanism is developed based on the compound motion principle of flexure hinge, which can accurately transform an input of linear motion into an output of rotary motion according to a certain relationship. Secondly, for finishing the error compensation scheme of the system, the maximum compensation modifier is proposed based on the analysis of error compensation equations of point-to-point motion and continuous motion. Finally, in order to facilitate the use of engineering, the driven voltage equation of error compensation is derived by the error compensation performance experiment. The simulation and experiment results indicate that both the design and error-compensation-range of the system satisfy the needs of practical application.

In this paper, a novel neural network based on parameter optimization Variational Mode Decomposition (VMD) and improved bidirectional long short-term memory (BiLSTM) is proposed. Wear state recognition method of ball screw element action unit component based on Bilstm. Firstly, Tent chaotic map and adaptive sine cosine Algorithm were used to improve the improved Northern Goshawk Optimisation Algorithm (INGO) to verify the superiority of INGO algorithm and determine the optimal parameter combination of VMD. Secondly, INGO-VMD was used to decompose the collected vibration signals and calculate the correlation of IMF components, and the multi-feature information matrix that could characterize the wear state change of the lead screw was constructed after retaining the IMF components with large correlation. Finally, the divided feature information matrix and labels were input into the Bilstm network model of Bayesian optimization (BO) for training, and the Softmax classifier was used to classify and identify the wear state category.