A diamagnetically stabilized levitation structure is composed of a floating magnet, diamagnetic material, and a lifting magnet. The floating magnet is freely levitated between two diamagnetic plates without any external energy input. In this paper, the levitation characteristics of a floating magnet were firstly studied through simulation. Three different levitation states were found by adjusting the gap between the two diamagnetic plates, namely symmetric monostable levitation, bistable levitation, and asymmetric monostable levitation. Then, according to experimental comparison, it was found that the stability of the symmetric monostable levitation system is better than that of the other two. Lastly, the maximum moving space that allows the symmetric monostable levitation state is investigated by Taguchi method. The key factors affecting the maximum gap were determined as the structure parameters of the floating magnet and the thickness of highly oriented pyrolytic graphite (HOPG) sheets. According to the optimal parameters, work performance was obtained by an experiment with an energy harvester based on the diamagnetic levitation structure. The effective value of voltage is 250.69 mV and the power is 86.8 $\mathsf{\mu }\mathrm{W}.$ An LED light is successfully lit on when the output voltage is boosted with a Cockcroft–Walton cascade voltage doubler circuit. This work offers an effective method to choose appropriate parameters for a diamagnetically stabilized levitation structure.

This paper presents a gas flowmeter by using the rotation of a diamagnetically levitated magnet rotor to measure the gas flowrate. Two highly oriented pyrolytic graphite (HOPG) sheets are introduced to build a diamagnetic levitation structure. By adjusting the distance between the two HOPG sheets, the diamagnetic levitation structure can be tuned to obtain a single potential well, which ensures the stable levitation and rotation of the magnet rotor and improves the stability of the sensor. The maximum distance for achieving a single potential well is measured to be 3.1 mm. The feasibility of the proposed flowmeter was verified by experiment. The performance of the sensor was tested, and the maximum relative error is 5.56%.

In order to solve the demand for low-power microcomputers and micro-electro-mechanical system components for continuous energy supply, a magnetic coupling piezoelectric–electromagnetic composite galloping energy harvester (MPEGEH) is proposed. It is composed of a piezoelectric energy harvester (PEH) and an electromagnetic energy harvester (EEH) coupled by magnetic force. The bistable nonlinear magnetic coupling structure improves the output power of the MPEGEH. The advantages and output performance of the MPEGEH are analyzed. The prototype of the energy harvester is made, and the nonlinear output characteristics under different load resistances are analyzed. Through the experiment on the key parameters of the composite energy harvester, it is found that the higher the coupling degree of the two parts of the MPEGEH, the stronger the nonlinear characteristics and the better the output characteristics. The results show that the onset wind velocity and output power of the MPEGEH are better than the classic galloping piezoelectric energy harvester (CGPEH). At the same wind speed, with the increase in the distance d₀ between magnets A and B, the output power of both the PEH and the EEH decreases. When d₀ is 37 mm, the output power of the EEH is the largest. The distance s₀ between magnets B and C has little influence on the output power of the PEH but has a great influence on the EEH. When s₀ is 23 mm, the EEH has the best output characteristics. Compared with the CGPEH, the onset wind velocity is reduced by 28%, and the output power is increased by 136% when the wind speed is 11 m/s.

The prevailing micromachined vibratory gyroscope typically has a proof mass connected to the substrate by a mechanical suspension system, which makes it face a tough challenge to achieve tactical or inertial grade performance levels. With a levitated rotor as the proof mass, a micromachined rotational gyroscope will potentially have higher performance than vibratory gyroscope. Besides working as a moment rebalance dual-axis gyroscope, the micromachined rotational gyroscope based on a levitated rotor can simultaneously work as a force balance tri-axis accelerometer. Micromachined rotational gyroscope based on an electrostatically levitated silicon micromachined rotor has been notably developed. In this paper, factors in designing a rotational gyro/accelerometer based on an electrostatically levitated disc-like rotor, including gyroscopic action of micro rotor, methods of stable levitation, micro displacement detection and control, rotation drive and speed control, vacuum packaging and microfabrication, are comprehensively considered. Hence a design of rotational gyro/accelerometer with an electroforming nickel rotor employing low cost UV-LIGA technology is presented. In this design, a wheel-like flat rotor is proposed and its basic dimensions, diameter and thickness, are estimated according to the required loading capability. Finally, its micromachining methods based on UV-LIGA technology and assembly technology are discussed.