In addition to surface roughness and shape precision, the subsurface damage (SSD) generated by single point diamond turning (SPDT) of Ge and Si crystal optics is of increasing importance with decreasing wavelength from infrared through visible, UV, and x-ray. There are various components of SSD, e.g., microcracks, dislocations, strain, and a near-surface amorphous layer, and there are also several techniques to evaluate various components of SSD. Cross-sectional transmission electron microscopy (XTEM) is expensive and not often directly used in the optics laboratory. However, because of its very high sensitivity to SSD and down to atomic resolution, it is often used as an external service for developing SPDT technology and other surface processing techniques. It is shown in the paper that improper sample preparation can generate near-surface amorphization. Measures to avoid this artifact and a test of reliability of XTEM sample preparation are proposed.

A volume, tomographic reconstruction of a novel, multi-jet gas puff target, developed for possible applications in high-order harmonic generation (HHG), is presented. The target, produced by pulsed injection of argon gas through nozzle in a form of linearly oriented small orifices, has been characterized in the extreme ultraviolet at 13.5 nm wavelength. Target density estimations were performed, and 3-D representation of pulsed gaseous target has been obtained by combining 2-D shadowgram images, recorded at various rotation angles. More detailed information about higher-order jets, formed as a result of collisions of primary jets, was obtained. Tomographic studies of such type of targets dedicated for HHG have been obtained to our knowledge for the first time.

We present the theoretical description of the image formation with the in-line germanium Bragg Magnifier Microscope (BMM) and the first successful phase retrieval of X-ray holograms recorded with this imaging system. The conditions under which the BMM acts as a linear shift invariant system are theoretically explained and supported by the experiment. Such an approach simplifies the mathematical treatment of the image formation and reconstruction as complicated propagation of the wavefront onto inclined planes can be avoided. Quantitative phase retrieval is demonstrated using a test sample and a proof of concept phase imaging of a spider leg is also presented.

A tomographic method for three-dimensional reconstruction of low density objects is presented and discussed. The experiment was performed in the extreme ultraviolet (EUV) spectral region using a desktop system for enhanced optical contrast and employing a compact laser–plasma EUV source, based on a double stream gas puff target. The system allows for volume reconstruction of transient gaseous objects, in this case gas jets, providing additional information for further characterization and optimization. Experimental details and reconstruction results are shown.