The integration of Artificial Intelligence (AI), the Internet of Things (IoT), and digital twin technologies is transforming modern manufacturing by enabling real-time monitoring, predictive analytics, and intelligent decisionmaking. While existing studies often investigate these technologies individually, limited research explores their combined potential within the emerging paradigm of Industry 5.0, which emphasizes sustainability, human-centric innovation, and resilient manufacturing systems. This study addresses this gap by conducting a systematic literature review of 25 peer-reviewed studies published between 2020 and 2025, following the PRISMA framework. The review synthesizes findings across four key application domains: predictive maintenance, quality control, process optimization, and supply chain management. The analysis shows that machine learning and deep learning techniques dominate predictive maintenance and defect detection, while reinforcement learning and hybrid AI-IoT-digital twin architectures enable adaptive scheduling, energy optimization, and intelligent logistics coordination. Empirical evidence from the reviewed studies indicates that integrated smart manufacturing systems can reduce energy consumption by 30-40%, unplanned downtime by 15-25%, and defective outputs by 10-20%, contributing significantly to resource efficiency and carbon-emission reduction. By combining thematic synthesis with a conceptual integration framework, this study provides a strategic roadmap for the transition from Industry 4.0 to sustainable Industry 5.0 manufacturing ecosystems. The findings highlight how the convergence of AI, IoT, and digital twin technologies supports circular economy principles, cleaner production practices, and resilient industrial systems, positioning these technologies as key enablers of next-generation sustainable manufacturing.