The objective of this paper is to demonstrate the integration of a MOF thin film on electrostatically actuated microstructures to realize a switch triggered by gas and a sensing algorithm based on amplitude tracking. The devices are based on the nonlinear response of micromachined clamped-clamped beams. The microbeams are coated with a metal-organic framework (MOF), namely HKUST-1, to achieve high sensitivity. The softening and hardening nonlinear behaviors of the microbeams are exploited to demonstrate the ideas. For gas sensing, an amplitude-based tracking algorithm is developed to quantify the captured quantity of gas. Then, a MEMS switch triggered by gas using the nonlinear response of the microbeam is demonstrated. Noise analysis is conducted, which shows that the switch has high stability against thermal noise. The proposed switch is promising for delivering binary sensing information, and also can be used directly to activate useful functionalities, such as alarming.

Highly efficient magnetic release from nanocomposite microparticles is shown, which are made of Poly (N-isopropylacrylamide) hydrogel with embedded iron nanowires. A simple microfluidic technique was adopted to fabricate the microparticles with a high control of the nanowire concentration and in a relatively short time compared to chemical synthesis methods. The thermoresponsive microparticles were used for the remotely triggered release of Rhodamine (B). With a magnetic field of only 1 mT and 20 kHz a drug release of 6.5% and 70% was achieved in the continuous and pulsatile modes, respectively. Those release values are similar to the ones commonly obtained using superparamagnetic beads but accomplished with a magnetic field of five orders of magnitude lower power. The high efficiency is a result of the high remanent magnetization of the nanowires, which produce a large torque when exposed to a magnetic field. This causes the nanowires to vibrate, resulting in friction losses and heating. For comparison, microparticles with superparamagnetic beads were also fabricated and tested; while those worked at 73 mT and 600 kHz, no release was observed at the low field conditions. Cytotoxicity assays showed similar and high cell viability for microparticles with nanowires and beads.

Responsive microgel poly(N-isopropylacrylamide) or PNIPAM is a gel that can swell or shrink in response to external stimuli (temperature, pH, etc.). In this work, a nanocomposite gel is developed consisting of PNIPAM and magnetic iron oxide nanobeads for controlled release of liquids (like drugs) upon exposure to an alternating magnetic field. Microparticles of the nanocomposite are fabricated efficiently with a monodisperse size distribution and a diameter ranging from 20 to 500 µm at a rate of up to 1 kHz using a simple and inexpensive microfluidic system. The nanocomposite is heated through magnetic losses, which is exploited for a remotely stimulated liquid release. The efficiency of the microparticles for controlled drug release applications is tested with a solution of Rhodamine B as a liquid drug model. In continuous and pulsatile mode, a release of 7% and 80% was achieved, respectively. Compared to external thermal actuation that heats the entire surrounding or embedded heaters that need complex fabrication steps, the magnetic actuation provides localized heating and is easy to implement with our microfluidic fabrication method.