We present an investigation of the nonlinear dynamics of clamped-clamped micromachined arches when actuated by a dc electrostatic load superimposed on an ac harmonic load. The Galerkin method is used to discretize the distributed-parameter model of a shallow arch to obtain a reduced-order model. The static response of the arch due to a dc load actuation is simulated, and the results are validated by comparing them to experimental data. The dynamic response of the arch to a combined dc load and ac harmonic load is studied when excited near its fundamental natural frequency, twice its fundamental natural frequency, and near other higher harmonic modes. The results show a variety of interesting nonlinear phenomena, such as hysteresis, softening behavior, dynamic snap-through, and dynamic pull-in. The results are also shown demonstrating the potential to use microelectromechanical systems (MEMS) arches as bandpass filters and low-powered switches. An experimental work is conducted to test arches realized of curved polysilicon microbeams when excited by dc and ac loads. Experimental data are shown for the softening behavior and the dynamic pull-in of the curved microbeams.

This work presents an investigation of the nonlinear dynamics of carbon nanotubes (CNTs) when actuated by a dc load superimposed to an ac harmonic load. Cantilevered and clamped-clamped CNTs are studied. The carbon nanotube is described by an Euler–Bernoulli beam model that accounts for the geometric nonlinearity and the nonlinear electrostatic force. A reduced-order model based on the Galerkin method is developed and utilized to simulate the static and dynamic responses of the carbon nanotube. The free-vibration problem is solved using both the reduced-order model and by solving directly the coupled in-plane and out-of-plane boundary-value problems governing the motion of the nanotube. Comparison of the results generated by these two methods to published data of a more complicated molecular dynamics model shows good agreement. Dynamic analysis is conducted to explore the nonlinear oscillation of the carbon nanotube near its fundamental natural frequency (primary-resonance) and near one-half, twice, and three times its natural frequency (secondary-resonances). The nonlinear analysis is carried out using a shooting technique to capture periodic orbits combined with the Floquet theory to analyze their stability. The nonlinear resonance frequency of the CNTs is calculated as a function of the ac load. Subharmonic-resonances are found to be activated over a wide range of frequencies, which is a unique property of CNTs. The results show that these resonances can lead to complex nonlinear dynamics phenomena, such as hysteresis, dynamic pull-in, hardening and softening behaviors, and frequency bands with an inevitable escape from a potential well.