Despite intense research on high entropy films, the mechanism of film growth and the influence of key factors remain incompletely understood. In this study, high entropy films consisting of five elements (FeCoNiCrAl) with columnar and nanometer-scale grains were prepared by magnetron sputtering. The high entropy film growth mechanism, including the formation of the amorphous domain, equiaxial nanocrystalline structure and columnar crystal was clarified by analyzing the microstructure in detail. Besides, the impacts of the important deposition parameters including the substrate temperature, the powder loaded in the target, and the crystal orientation of the substrate on the grain size and morphology, phase structure, crystallinity and elemental uniformity were revealed. The mechanical properties of high entropy films with various microstructure features were investigated by nanoindentation. With the optimized grain size and microstructure, the film deposited at 350 °C using a power of 100 W exhibits the highest hardness of 11.09 GPa. Our findings not only help understanding the mechanisms during the high entropy film deposition, but also provide guidance in manufacturing other novel high entropy films.

Tungsten (W), as a promising plasma-facing material for fusion nuclear reactors, exhibits ductility reduction. Introducing high-density coherent nano-dispersoids into the W matrix is a highly efficient strategy to break the tradeoff of the strength–ductility performance. In this work, we performed helium (He) ion irradiation on coherent oxide-dispersoids strengthened (ODS) W to investigate the effect of coherent nanoparticle interfaces on the behavior of He bubbles. The results show that the diameter and density of He bubbles in ODS W are close to that in W at low dose of He ion irradiation. The radiation-induced hardening increment of ODS W, being 25% lower than that of pure W, suggests the involvement of the coherent interface in weakening He ion irradiation-induced hardening and emphasizes the potential of coherent nano-dispersoids in enhancing the radiation resistance of W-based materials.

Cu₃₀Al₇₀ and Ag₃₀Al₇₀ multilayer precursor films were prepared by magnetron sputtering, respectively. Then the nanoporous Cu/Ag multilayer composite films were successfully prepared by selecting the appropriate H₂SO₄ solution as the dealloying solution. It was found that the nanoporous structure was stable in the dealloying solution. The morphology and structure of nanoporous multilayer films are mainly related to the phase composition of precursors. The structure of nanoporous multilayers can be simply regarded as the superposition of single-layer structures. Our work shows that nanoporous multilayers can be well-prepared by magnetron sputtering combined with dealloying.