Despite intense research on high entropy films, the mechanism of film growth and the influence of key factors remain incompletely understood. In this study, high entropy films consisting of five elements (FeCoNiCrAl) with columnar and nanometer-scale grains were prepared by magnetron sputtering. The high entropy film growth mechanism, including the formation of the amorphous domain, equiaxial nanocrystalline structure and columnar crystal was clarified by analyzing the microstructure in detail. Besides, the impacts of the important deposition parameters including the substrate temperature, the powder loaded in the target, and the crystal orientation of the substrate on the grain size and morphology, phase structure, crystallinity and elemental uniformity were revealed. The mechanical properties of high entropy films with various microstructure features were investigated by nanoindentation. With the optimized grain size and microstructure, the film deposited at 350 °C using a power of 100 W exhibits the highest hardness of 11.09 GPa. Our findings not only help understanding the mechanisms during the high entropy film deposition, but also provide guidance in manufacturing other novel high entropy films.

Cu₃₀Al₇₀ and Ag₃₀Al₇₀ multilayer precursor films were prepared by magnetron sputtering, respectively. Then the nanoporous Cu/Ag multilayer composite films were successfully prepared by selecting the appropriate H₂SO₄ solution as the dealloying solution. It was found that the nanoporous structure was stable in the dealloying solution. The morphology and structure of nanoporous multilayer films are mainly related to the phase composition of precursors. The structure of nanoporous multilayers can be simply regarded as the superposition of single-layer structures. Our work shows that nanoporous multilayers can be well-prepared by magnetron sputtering combined with dealloying.

This study explores the mechanical and optical properties of nanoporous copper (NPC) films dealloyed in acid and base using qualitative and quantitative measurements. Two types of NPC films (NPC 1 and NPC 2) were prepared by dealloying precursor films in different corrosive solutions. The films were characterized using atomic force microscopy (AFM) and scattering scanning near-field optical microscopy (s-SNOM). The AFM analysis revealed distinct nanoporous structures in both films, with NPC 2 showing larger pore sizes and the presence of copper aggregations on the surface. Rugosity measures showed that NPC 2 had higher rugosity than NPC 1 and indicated fundamental differences in the height distributions of the surface nano-topography. The Minkowski connectivity analysis highlighted differences in connectedness and topological characteristics between the two samples. The analysis of the GLCM features showed clear distinctions in ASM, Contrast, Dissimilarity, Energy, and Homogeneity between NPC 1 and NPC 2. The s-SNOM results demonstrated altered optical properties, with NPC 1 showing higher contrast at 1550 nm, while NPC 2 exhibited reversed-phase contrast at 561 nm. The phase contrast at 638 nm indicated a red-shifted optical absorption peak in NPC 2 compared to NPC 1.