In recent years, the optical accelerometer based on the optical trapping force effect has gradually attracted the attention of researchers for its high sensitivity and high measurement accuracy. However, due to its large size and the complexity of optical path adjustment, the optical force accelerometers reported are only suitable for the laboratory environment up to now. In this paper, a miniature optical force dual-axis accelerometer based on the miniature optical system and a particles cavity which is prepared by Micro-Electro-Mechanical Systems (MEMS) technology is proposed. The overall system of the miniature optical levitation including the miniature optical system and MEMS particles cavity is a cylindrical structure with a diameter of about 10 mm and a height of 33 mm (Φ 10 mm × 33 mm). Moreover, the size of this accelerometer is 200 mm × 100 mm × 100 mm. Due to the selected light source being a laser diode light source with elliptical distribution, it is sensitive to the external acceleration in both the long axis and the short axis. This accelerometer achieves a measurement range of ±0.17 g–±0.26 g and measurement resolution of 0.49 mg and 1.88 mg. The result shows that the short-term zero-bias stability of the two orthogonal axes of the optical force accelerometer is 4.4 mg and 9.2 mg, respectively. The main conclusion that can be drawn is that this optical force accelerometer could provide an effective solution for measuring acceleration with an optical force effect for compact engineering devices.

Rapid advancements in general‐purpose humanoid robots have spurred extensive in‐depth research on bionic vision systems (BVSs) with human‐like ocular functions. However, fabricating a gram‐weight miniature artificial eyeball integrated with optical imaging, dynamic field‐of‐view (FOV) modulation, and intelligent target tracking remains challenging. A biomimetic eyeball system (BES) based on the miniature origami mechanism (MOM) with three degrees of freedom (DOFs) is presented in this study to solve the inherent problems of traditional electromechanical BVSs (large volume and weight). The performance of BES in the FOV adjustment range (monocular exceeding 151.6° × 151.6°) not only precisely matches the physiological characteristics of the human eye but also offers advantages in overall size (Φ23 mm × 15 mm) and weight (1.8 g) over systems reported in current research. This system also performs high‐speed movement (saccade, 4382°/s), dynamic imaging (smooth pursuit, 532°/s), interactive control under human–robot collaboration, and active zooming. It demonstrates target recognition, locking, and tracking abilities functionally equivalent to human smooth‐pursuit movements in scenarios with active target locking based on visual attention mechanisms. This study overcomes the dual tradeoff between miniaturization and functional integrity in traditional BVSs through the novel visual solution that integrates spatial adaptability, motion compatibility, and cognitive decision‐making capabilities.

The vacuum chamber is an important part of microparticle optical levitation technology. The traditional vacuum chamber has a large volume and many peripheral components, which cannot meet the requirements of miniaturization and on-chip optical levitation technology. Therefore, this study proposes a novel microparticle vacuum chamber based on the micro-electro-mechanical system (MEMS) process. This MEMS microparticle vacuum chamber adopts a “glass-silicon-glass” three-layer vacuum bonding process, with a volume of only 15 mm × 12 mm × 1.2 mm, including particle chamber, cantilever resonator chamber, and getter chamber, which can encapsulate microparticles in a tiny vacuum environment and realize optical levitation of microparticles. At the same time, the air pressure in the micro vacuum chamber is monitored by the cantilever resonator, which can provide a miniaturized microparticle chamber with a more accurate vacuum environment for microparticle optical levitation. The research of this paper has significance for promoting the development of miniaturized optical levitation technology.