PhD of CEA leti (France, Grenoble) and the university of Rennes (France, Rennes, ISCR) Supervisors: Maryline GUILLOUX-VIRY (ISCR) Gwenael LE RHUN (CEA leti) Christophe POULAIN (CEA leti) Subject: Lead-free piezoelectric thin films for actuation and reliability Fields: Microelectronics, Materials