Increasing levels of system integration pose difficulties in meeting design specifications for high-performance systems. Oftentimes increased complexity, nonlinearity, and multiple tradeoffs need to be handled simultaneously during the design cycle. Since components in such systems are highly correlated with each other, codesign and co-optimization of the complete system are required. Machine learning (ML) provides opportunities for analyzing such systems with multiple control parameters, where techniques based on Bayesian optimization (BO) can be used to meet or exceed design specifications. In this paper, we propose a new BO-based global optimization algorithm titled Two-Stage BO (TSBO). TSBO can be applied to black box optimization problems where the computational time can be reduced through a reduction in the number of simulations required. Empirical analysis on a set of popular challenge functions with several local extrema and dimensions shows TSBO to have a faster convergence rate as compared with other optimization methods. In this paper, TSBO has been applied for clock skew minimization in 3-D integrated circuits and multiobjective co-optimization for maximizing efficiency in integrated voltage regulators. The results show that TSBO is between 2$x$-4$x$ faster as compared with previously published BO algorithms and other non-ML-based techniques.

Abstarct: Microplates are the building blocks of many micro-electro-mechanical systems. It is common for them to experience initial curvature imperfection due to residual stresses caused by the micro fabrication process. Such plates are essentially different from perfectly flat ones and cannot be modeled using flat plate models. In this paper, we adopt a dynamic analog of the von Karman governing equations of imperfect plates. These equations are then used to develop a reduced order model based on the Galerkin procedure, to simulate the static and dynamic behavior of the microplate under electrostatic actuation. To validate the simulation results, an initially curved imperfect microplate made of silicon nitride is fabricated and tested. The static behaviour of the microplate is investigated when applying a DC voltage V _dc . Then, the dynamic behaviour of the microplate is examined under the application of a harmonic AC voltage, V _ac , superimposed to V _dc . The simulation results show good agreement with the experimentally measured responses.

We present an experimental investigation for the nonlinear dynamic behaviors of clamped–clamped in-plane MEMS shallow arches when excited by harmonic electrostatic forces. Frequency sweeps are conducted to study the dynamic behaviors in the neighborhoods of the first and third resonance frequencies as well as the super-harmonic resonances. Experimental results show local softening behavior of small oscillations around the first resonance frequency and hardening behavior at the third resonance frequency for small dc and ac loads. Interesting dynamic snap-through cross-well motions are observed experimentally at high voltages for the first time in the micro-scale world. In addition to the dynamic snap-through motion, the MEMS arch exhibits large oscillations of a continuous band of snap-through motion between the super-harmonic resonance regime and the first primary resonance regime. This continuous band is unprecedented experimentally in the micro/macro world, and is promising for a variety of sensing, actuation and communications applications.

This work investigates the dynamics of a microbeam-based MEMS device in the neighborhood of a 2:1 internal resonance between the third and fifth vibration modes. The saturation of the third mode and the concurrent activation of the fifth are observed. The main features are analyzed extensively, both experimentally and theoretically. We experimentally observe that the complexity induced by the 2:1 internal resonance covers a wide driving frequency range. Constantly comparing with the experimental data, the response is examined from a global perspective, by analyzing the attractor-basins scenario. This analysis is conducted both in the third-mode and in fifth-mode planes. We show several metamorphoses occurring as proceeding from the principal resonance to the 2:1 internal resonance, up to the final disappearance of the resonant and non-resonant attractors. The shape and wideness of all the basins are examined. Although they are progressively eroded, an appreciable region is detected where the compact cores of the attractors involved in the 2:1 internal resonance remain substantial, which allows effectively operating them under realistic conditions. The dynamical integrity of each resonant branch is discussed, especially as approaching the bifurcation points where the system becomes more vulnerable to the dynamic pull-in instability.

In this paper, the design, modeling, fabrication, and characterization of System-in-Package (SiP) solenoid power inductor using a NiZn ferrite composite magnetic core material is demonstrated. A novel fabrication process has been developed for integrating the inductor into the buck-type integrated voltage regulator (IVR) module. The process uses stencil printing to deposit and pattern the magnetic core material. Photolithography and copper electroplating are used to form the windings. The electrical parameters of the fabricated inductors were extracted from measurements. The inductors had an average dc resistance of 19 $\text{m}\Omega $ , average inductance of 28.3 nH, and average ac resistance of $2.28~\Omega $ at 100 MHz, which is the operating frequency of the IVR. The organic substrate parasitic effect led to an average shunt capacitance of 2.31 pF and an average parasitic conductance of 0.12 mS at 100 MHz. The 10% saturation current was 11.53 A. The electrical parameters of the fabricated inductors were modeled and showed good accuracy with measured data. The inductors showed an inductance to dc resistance ratio of 1613 nH/ $\Omega $ . The area and volume energy densities were 158.4 nJ/mm ² and 283.0 nJ/mm ³ , respectively. These are the highest reported values for a solenoid magnetic core power inductor at 100 MHz.