Marcin Lelit

Mr. Marcin Lelit

orcid

Research Focus & Metrics

Academic Career Length

5Years (2022-Present)

(Calculated once Scilit publication data is synced: current year − year of first publication + 1)

Representative Publications

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14 February 2022 in Materials
Verified
Journal Article
Open access
PDF file
MLMarcin Lelit
Marcin Lelit
MSMateusz Słowikowski
Mateusz Słowikowski
MFMaciej Filipiak
Maciej Filipiak
MJMarcin Juchniewicz
Marcin Juchniewicz
BSBartłomiej Stonio
Bartłomiej Stonio
RPRyszard Piramidowicz
Ryszard Piramidowicz
The fabrication processes for silicon nitride photonic integrated circuits evolved from microelectronics components technology—basic processes have common roots and can be executed using the same type of equipment. In comparison to that of electronics components, passive photonic structures require fewer manufacturing steps and fabricated elements have larger critical dimensions. In this work, we present and discuss our first results on design and development of fundamental building blocks for silicon nitride integrated photonic platform. The scope of the work covers the full design and manufacturing chain, from numerical simulations of optical elements, design, and fabrication of the test structures to optical characterization and analysis the results. In particular, technological processes were developed and evaluated for fabrication of the waveguides (WGs), multimode interferometers (MMIs), and arrayed waveguide gratings (AWGs), which confirmed the potential of the technology and correctness of the proposed approach.