The mass sensitivity of thin aluminum nitride (AlN) film S0 Lamb wave resonators is theoretically and experimentally studied. Theoretical predictions based on modal and finite elements method analysis are experimentally verified. Here, two-port 888 MHz synchronous FPARs are micromachined and subsequently coated with hexamethyl-disiloxane(HMDSO)-plasma-polymerized thin films of various thicknesses. Systematic data on frequency shift and insertion loss versus film thickness are presented. FPARs demonstrate high mass-loading sensitivity as well as good tolerance towards the HMDSO viscous losses. Initial measurements in gas phase environment are further presented.
The detection of hazardous gases at different concentration levels at low and room temperature is still an actual and challenging task. In this paper, Al-doped ZnO thin films are synthesized by the electrochemical deposition method on the gold electrodes of AT-cut quartz resonators, vibrating at 10 MHz. The average roughness, surface morphology and gas sensing properties are investigated. The average roughness of Al-doped ZnO layers strongly depends on the amount of the doping agent Al2(SO4)3 added to the solution. The structural dependence of these films with varying Al concentrations is evident from the scanning electron microscopy images. The sensing properties to ethanol and ammonia analytes were tested in the range of 0–12,800 ppm. In the analysis of the sensitivity to ammonia, a dependence on the concentration of the added Al2(SO4)3 in the electrochemically deposited layers is also observed, as the most sensitive layer is at 3 × 10−5 M. The sensitivity and the detection limit in case of ammonia are, respectively, 0.03 Hz/ppm and 100 ppm for the optimal doping concentration. The sensitivity depends on the active surface area of the layers, with those with a more developed surface being more sensitive. Al-doped ZnO layers showed a good long-term stability and reproducibility towards ammonia and ethanol gases. In the case of ethanol, the sensitivity is an order lower than that for ammonia, as those deposited with Al2(SO4)3 do not practically react to ethanol.
This article focuses on the impact of the deposition temperature (in the range from 60 to 80 °C) in ZrO2 films obtained by the electrochemical deposition process on SnO2-covered glass substrates. The solution in which the deposition takes place is aqueous, containing ZrOCl2 with a concentration of 3 × 10−5 M and KCl with a concentration of 0.1 M. By implementing X-ray diffraction (XRD), optical profilometry, scanning electron microscopy (SEM), and UV-VIS-NIR spectroscopy, the temperature dependence of ZrO2 films properties was revealed. The X-ray Diffraction XRD spectra showed six different diffraction maxima ((−111)M, (101)T, (111)M, (112)M, (202)M, and (103)M) associated with the electrochemical ZrO2 layers, and the polycrystalline structure of the films was confirmed at all deposition temperatures. The determination of the average roughness did not indicate significant temperature dependence in the deposited layers. SEM micrographs showed that the layers were composed of grains, most of them of a regular shape, although their size increased slightly with an increased deposition temperature. The coarsest-grained structure was observed for the layers deposited at 80 °C. It was demonstrated that the deposition temperature weakly impacts the reflectance and transmittance spectra of the ZrO2 layers. Such layers with low values of specular and high values of diffuse transition, and reflection in the spectral range from 380 to 800 nm, can be applied to various optoelectronic devices such as thin-film solar cells.
This study focuses on the influence of electrospray deposition parameters on the morphology, topography, optical and sensing properties of ZnO films deposited on gold electrodes of quartz crystal resonators. The substrate temperature, precursor feed rate and emitter’s voltage were varied. Zinc acetate dehydrate dissolved in a mixture of deionized water, ethanol and acetic acid was used as a precursor. The surface morphology and average roughness of the films were studied by scanning electron microscopy (SEM) and 3D optical profilometry, respectively, while the optical properties were investigated by diffuse reflectance and photoluminescence measurements. The sensing response toward ammonia was tested and verified by the quartz crystal microbalance (QCM) method. The studies demonstrated that electrospray deposition parameters strongly influence the surface morphology, roughness and gas sensing properties of the films. The deposition parameters were optimized in order for the highest sensitivity toward ammonia to be achieved. The successful implementation of the electrospray method as a simple, versatile and low-cost method for deposition of ammonia-sensitive and selective ZnO films used as a sensing medium in QCM sensors was demonstrated and discussed.
This paper presents a complex analytical study on the distribution, solubility, amorphization, and compatibility of diltiazem within the composition of Eudragit RS 100-based particles of microspongeous type. For this purpose, a methodology combining attenuated total reflectance Fourier transform infrared (ATR-FTIR) absorption spectroscopy, differential scanning calorimetry (DSC), scanning electron microscopy with energy-dispersive X-ray microanalysis (SEM-EDX), and in vitro dissolution study is proposed. The correct interpretation of the FTIR and drug-dissolution results was guaranteed by the implementation of two contrasting reference models: physical drug–polymer mixtures and casting-obtained, molecularly dispersed drug–polymer composites (solid dispersions). The spectral behavior of the drug–polymer composites in the carbonyl frequency (νCO) region was used as a quality marker for the degree of their interaction/mutual solubility. A spectral-pattern similarity between the microsponge particles and the solid dispersions indicated the molecular-type dispersion of the former. The comparative drug-desorption study and the qualitative observations over the DSC and SEM-EDX results confirmed the successful synthesis of a homogeneous coamorphous microsponge-type formulation with excellent drug-loading capacity and “controlled” dissolution profile. Among them, the drug-delivery particles with 25% diltiazem content (M-25) were recognized as the most promising, with the highest population of drug molecules in the polymer bulk and the most suitable desorption profile. Furthermore, an economical and effective analytical algorithm was developed for the comprehensive physicochemical characterization of complex delivery systems of this kind.