In present paper we report the fabrication process of a high-temperature SAW-sensor based on a langasite crystal. Interdigital transducers of the SAW-resonator structures were fabricated from Ir which was evaporated using magnetron sputtering technique. The SAW-sensors were designed with different coefficient of metallization of an IDT, which strongly influences on the value of the SAW velocity and resonance excitation frequency, respectively. The process of the SAW excitation was investigated using high-resolution X-ray diffraction techniqu

The result of X-ray diffraction study on a single crystal of the calcium-gallogermanate family Ca₃TaGa₃Si₂O₁₄ (CTGS) modulated by a surface acoustic wave (SAW) is presented. The power flow angle for SAW propagating along the X₂ axis of the X-cut in CTGS was measured. The rocking curves for the CTGS crystal were recorded at different amplitudes of an input high frequency electric signal on interdigital transducer used to excite a SAW. Based on the data obtained, intensity dependence of diffraction satellites on the amplitude of electric signal exciting a SAW was built. Numerical simulation of the crystal rocking curves and dependence of diffraction satellite intensities on the SAW amplitude enabled the selection of a set of material constants at which the most complete coincidence of experimental and calculated results is observed.