Aluminum oxide (Al₂O₃) amorphous structure with short-range order and long-range disorder has presented promising applications in optical and optoelectronic devices. In this paper, the Al₂O₃ films with different thickness were prepared by atomic layer deposition (ALD) technology at 200°C in order to achieve amorphous structure. X-ray diffraction (XRD) and energy dispersive spectrum (EDS) results indicated that the Al₂O₃ films were amorphous structure and stable O/Al ratio. The surface topography investigated by atomic force microscopy (AFM) showed that the samples were smooth and crack-free. Spectroscopic ellipsometer (SE) measurements were operated to investigate the effect of thickness on the structure and optical properties of films with Tauc-Lorentz model. It is found that the band gap exhibits a steady value ~2.3 eV by the UV-VIS transmittance method, but the T-L model was ~3.0 eV. The refractive index and extinction coefficient are related to the variation of thickness and the samples surface quality of amorphous network structure in the thin films. The outstanding optoelectronic properties and facile fabrication of Al₂O₃ films amorphous structure can be extended to other similar oxides, which could display wide applications in various engineering and industrial fields.

The flexible pressure sensor has attracted much attention due to its wearable and conformal advantage. All the same, enhancing its electrical and structural properties is still a huge challenge. Herein, a flexible integrated pressure sensor (FIPS) composed of a solid silicone rubber matrix, composited with piezoelectric powers of polyacrylonitrile/Polyvinylidene fluoride (PAN/PVDF) and conductive silver-coated glass microspheres is first proposed. Specifically, the mass ratio of the PAN/PVDF and the rubber is up to 4:5 after mechanical mixing. The output voltage of the sensor with composite PAN/PVDF reaches 49 V, which is 2.57 and 3.06 times that with the single components, PAN and PVDF, respectively. In the range from 0 to 800 kPa, its linearity of voltage and current are all close to 0.986. Meanwhile, the sensor retains high voltage and current sensitivities of 42 mV/kPa and 0.174 nA/kPa, respectively. Furthermore, the minimum response time is 43 ms at a frequency range of 1–2.5 Hz in different postures, and the stability is verified over 10,000 cycles. In practical measurements, the designed FIPS showed excellent recognition abilities for various gaits and different bending degrees of fingers. This work provides a novel strategy to improve the flexible pressure sensor, and demonstrates an attractive potential in terms of human health and motion monitoring.