In 1959, Lawson and co-workers published the paper which triggered development of variable band gap Hg1−xCdxTe (HgCdTe) alloys providing an unprecedented degree of freedom in infrared detector design. HgCdTe ternary alloy has been used for realization of detectors operating under various modalities including: photoconductor, photodiode, and metal-insulator-semiconductor detector designs. Over the last five decades, this material system has successfully overcome the challenges from other material systems. It is important to notice that none of these competitors can compete in terms of fundamental properties. The competition may represent more mature technology but not higher performance or, with the exception of thermal detectors, higher operating temperatures (HOTs) for ultimate performance. In the last two decades, several new concepts for improvement of the performance of photodetectors have been proposed. These new concepts are particularly addressing the drive towards the so called HOT detectors aiming to increase detector operating temperatures. In this paper, new strategies in photodetector designs are reviewed, including barrier detectors, unipolar barrier photodiodes, multistage detectors and trapping detectors. Some of these new solutions have emerged as a real competitor to HgCdTe photodetectors.
The realization of high-performance tunable absorbers for terahertz frequencies is crucial for advancing applications such as single-pixel imaging and spectroscopy. Based on the strong position sensitivity of metamaterials’ electromagnetic response, we combine meta-atoms that support strongly localized modes with suspended flat membranes that can be driven electrostatically. This design maximizes the tunability range for small mechanical displacements of the membranes. We employ a micro-electro-mechanical system technology and successfully fabricate the devices. Our prototype devices are among the best-performing tunable THz absorbers demonstrated to date, with an ultrathin device thickness (~1/50 of the working wavelength), absorption varying between 60% and 80% in the initial state when the membranes remain suspended, and fast switching speed (~27 μs). The absorption is tuned by an applied voltage, with the most marked results achieved when the structure reaches the snap-down state. In this case, the resonance shifts by >200% of the linewidth (14% of the initial resonance frequency), and the absolute absorption modulation measured at the initial resonance can reach 65%. The demonstrated approach can be further optimized and extended to benefit numerous applications in THz technology.
This paper reports on a MEMS tunable Fabry-Perot filter technology capable of achieving nanometer-scale optical flatness across a large mirror area of up to square centimeters without any extraneous stress management techniques. The device employs a single-layer tensile silicon or germanium membrane for the suspended top mirror. Optical characterization of the fabricated single-membrane-based tunable filters for the SWIR, MWIR, and LWIR is presented. The fabricated 1000-μm dimension Si-membrane-based SWIR and MWIR filters are demonstrated with a wavelength tuning range of 1.77-2.42 and 4.1-4.9 μm, respectively, while the fabricated 200-μm-dimension Ge-membrane-based LWIR filter is demonstrated with a wavelength tuning range of 8.5-11.46 μm. All these filters are shown to achieve transmission characteristics that exceed the optical requirements for multispectral imaging applications. A large-area 1-cm dimension Si membrane-based SWIR tunable Fabry-Perot filter for multispectral imaging is demonstrated as a proof-of-concept, showing an excellent surface flatness in the order of 25 nm and an excellent optical uniformity with transmission peak wavelength variability less than 3% across the entire 1-cm dimension optical imaging area. In addition, the optical transmission behavior of the Fabry-Perot filters based on three-layer Si or Ge-based air-spaced DBRs for SWIR, MWIR, and LWIR is modeled, demonstrating that these filters can achieve a fine spectral resolution of several tens of nanometers suitable for hyperspectral imaging applications.
6 January 2016 in Journal of Microelectromechanical Systems
This paper reports on a proof-of-concept microelectromechanical system-based Fabry-Perot filter that is capable of electrically tuning within the long-wave infrared thermal imaging band of 8-12 μm. The device employs a single-layer quarter-wavelength thick tensile germanium membrane for the suspended top mirror in order to achieve nanometer-scale as-released mirror flatness across an area of several hundred square micrometers without any extraneous stress management techniques. Mechanical and optical characterization of the tunable filters of various sizes are presented and compared. A 200-μm dimension square filter is demonstrated with <;100-nm top mirror bowing and near-theoretical spectral characteristics across the entire tuning range of 8.5-11.5 μm, namely, peak transmission above 80%, full-width at half-maximum of spectral passband of approximately 500 nm, and out-of-band rejection greater than 40:1. Optical modeling shows that this filter can achieve a pixel-to-pixel transmission peak wavelength variation of less than 1.2% across the entire 200 μm × 200-μm optical imaging area. These results exceed the optical performance requirements for passive multispectral thermal imaging applications based on large-area focal plane arrays. In comparison, the 500 and 1000-μm dimension filters are shown to exhibit significant mirror bowing with actuation and, thus, for a pixel-to-pixel transmission peak wavelength non-uniformity of <; 4%, demonstrate narrower usable spectral tuning ranges of 9.3-11.4 and 10.3-11.3 μm, respectively.