The NiP coating has excellent wear and corrosion resistance, and electroless nickel-phosphorus coating is one of the best measures for surface modification of metal optical devices. The NiP layer could be processed by single-point diamond turning (SPDT). However, the periodic marks on the surface of the NiP coating processed by SPDT will lead to diffraction and stray light, which will reduce the reflectivity and image quality of the mirror. This paper studied smoothing polishing based on chemical mechanical polishing to remove turning periodic marks efficiently. Firstly, we studied the chemical corrosion and mechanical removal mechanism of smoothing polishing of the NiP coating through theoretical analysis. Then, the influencing factors of processing the quality of smoothing polishing are analyzed, and the optimal machining parameters and polishing slurry formula are formulated. Finally, through the developed process, the surface roughness of Root Mean Square (RMS) 0.223 nm is realized on the NiP coating, and an ultra-smooth surface that can meet the service accuracy of a hard X-ray mirror is obtained. Our research simplifies the high-precision machining process of the NiP coating and improves the machining efficiency. Therefore, it can be used as a new high-precision manufacturing NiP coating method.

Convex blazed gratings, which can effectively broaden the spectral range and improve spectral resolution, have gradually evolved into a crucial optical component for lightweight and compact imaging spectroscopy instruments. Their design, processing, and testing involve multidisciplinary interdisciplinary scientific issues, and they continue to be a major area of research in imaging optics applications. This paper summarizes the effects of various grating groove shapes and structural parameters on the spectral range and diffraction efficiency of convex blazed gratings, after providing a brief introduction to the typical functions and applications of convex blazed gratings. Firstly, the latest progress in typical processing methods for convex blazed gratings is reviewed. It focuses on the current fabrication processes and reviews their capabilities in creating convex blazed gratings from three main types of technologies, namely ultra-precision machining, high-energy density beam processing, and chemically assisted fabrication processes. Secondly, the adaptability of the manufacturing process for convex blazed gratings on different scales is summarized, analyzing the adaptation of current procedures to various grating fabrication scales and their bottlenecks. Finally, the characterization methods and future feasible characterization methods for convex blazed gratings are reviewed. The development trend of efficient and precise preparation of convex blazed gratings is pointed out.

The surface of metal mirrors is often polished by electroless coating with a Ni–P modified layer after single-point diamond turning. In practice, however, improvements in mirror quality are closely related to the polishing environment, polishing medium, and polishing force. If not adequately controlled, processing defects such as visible scratches can lead to the deterioration of surface roughness. Based on the Ni–P modified surface of a metal reflector mirror, this study optimizes the configuration of magnetorheological figuring (MRF) fluid and polishing process parameters so that MRF high-efficiency surface modification can be realized and the scratch problem can be resolved. The processing method of a high-performance metal mirror is developed by studying the high-efficiency and high-precision processing technology based on small head smoothing. The surface roughness achieved by the proposed method was better than Ra = 0.39 nm. The ultrasonic cleaning process effectively improved the surface roughness after processing. According to the combined processing technology developed in this study, the modified layer of the parabolic mirror with a diameter of 370 mm was processed, and the surface quality was increased from RMS = 338.684 nm to RMS = 21.267 nm.

A computer-generated hologram (CGH) is the core component for an aspheric surface test. According to fabrication demands, it is necessary to convert the designed CGH phase compensation function into the processed pattern, that is, the fringe discretization process. In this paper, we propose a new discretization method for a CGH in a test of the freeform surface, and realized the encoding of processed fringes by MATLAB software. Furthermore, we designed the experiment to verify the accuracy of the new discretization method and compared the calculation efficiency between the new algorithm and the reported algorithm. Finally, based on the testing requirement of a freeform mirror in a camera optical system, we completed the design, encoding, and fabrication of the CGH sample, and analyzed the influence of various errors on wavefront accuracy of the CGH.

NiP coating has excellent physicochemical properties and is one of the best materials for coating optical components. When processing NiP coatings on optical components, single-point diamond turning (SPDT) is generally adopted as the first process. However, SPDT turning produces periodic turning patterns on the workpiece, which impacts the optical performance of the component. Magnetorheological finishing (MRF) is a deterministic sub-aperture polishing process based on computer-controlled optical surface forming that can correct surface shape errors and improve the surface quality of workpieces. This paper analyzes the characteristics of NiP coating and develops a magnetorheological fluid specifically for the processing of NiP coating. Based on the basic Preston principle, a material removal model for the MRF polishing of NiP coating was established, and the MRF manufacturing process was optimized by orthogonal tests. The optimized MRF polishing process quickly removes the SPDT turning tool pattern from the NiP coating surface and corrects surface profile errors. At the same time, the surface quality of the NiP coating has also been improved, with the surface roughness increasing from Ra 2.054 nm for SPDT turning to Ra 0.705 nm.