The NiP coating has excellent wear and corrosion resistance, and electroless nickel-phosphorus coating is one of the best measures for surface modification of metal optical devices. The NiP layer could be processed by single-point diamond turning (SPDT). However, the periodic marks on the surface of the NiP coating processed by SPDT will lead to diffraction and stray light, which will reduce the reflectivity and image quality of the mirror. This paper studied smoothing polishing based on chemical mechanical polishing to remove turning periodic marks efficiently. Firstly, we studied the chemical corrosion and mechanical removal mechanism of smoothing polishing of the NiP coating through theoretical analysis. Then, the influencing factors of processing the quality of smoothing polishing are analyzed, and the optimal machining parameters and polishing slurry formula are formulated. Finally, through the developed process, the surface roughness of Root Mean Square (RMS) 0.223 nm is realized on the NiP coating, and an ultra-smooth surface that can meet the service accuracy of a hard X-ray mirror is obtained. Our research simplifies the high-precision machining process of the NiP coating and improves the machining efficiency. Therefore, it can be used as a new high-precision manufacturing NiP coating method.

The surface of metal mirrors is often polished by electroless coating with a Ni–P modified layer after single-point diamond turning. In practice, however, improvements in mirror quality are closely related to the polishing environment, polishing medium, and polishing force. If not adequately controlled, processing defects such as visible scratches can lead to the deterioration of surface roughness. Based on the Ni–P modified surface of a metal reflector mirror, this study optimizes the configuration of magnetorheological figuring (MRF) fluid and polishing process parameters so that MRF high-efficiency surface modification can be realized and the scratch problem can be resolved. The processing method of a high-performance metal mirror is developed by studying the high-efficiency and high-precision processing technology based on small head smoothing. The surface roughness achieved by the proposed method was better than Ra = 0.39 nm. The ultrasonic cleaning process effectively improved the surface roughness after processing. According to the combined processing technology developed in this study, the modified layer of the parabolic mirror with a diameter of 370 mm was processed, and the surface quality was increased from RMS = 338.684 nm to RMS = 21.267 nm.

NiP coating has excellent physicochemical properties and is one of the best materials for coating optical components. When processing NiP coatings on optical components, single-point diamond turning (SPDT) is generally adopted as the first process. However, SPDT turning produces periodic turning patterns on the workpiece, which impacts the optical performance of the component. Magnetorheological finishing (MRF) is a deterministic sub-aperture polishing process based on computer-controlled optical surface forming that can correct surface shape errors and improve the surface quality of workpieces. This paper analyzes the characteristics of NiP coating and develops a magnetorheological fluid specifically for the processing of NiP coating. Based on the basic Preston principle, a material removal model for the MRF polishing of NiP coating was established, and the MRF manufacturing process was optimized by orthogonal tests. The optimized MRF polishing process quickly removes the SPDT turning tool pattern from the NiP coating surface and corrects surface profile errors. At the same time, the surface quality of the NiP coating has also been improved, with the surface roughness increasing from Ra 2.054 nm for SPDT turning to Ra 0.705 nm.