Su Wei Wang

Mr. Su Wei Wang


Research Focus & Metrics

Academic Career Length

5Years (2022-Present)

(Calculated once Scilit publication data is synced: current year − year of first publication + 1)

Representative Publications

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12 May 2022 in Micromachines
Verified
Journal Article
Open access
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SWSu Wei Wang
Su Wei Wang
JWJun Wang
Jun Wang
WLWenhao Li
Wenhao Li
YLYangyang Liu
Yangyang Liu
JLJiashun Li
Jiashun Li
PJPinggang Jia
Pinggang Jia
In this paper, a high-fineness fiber-optic Fabry–Perot high-temperature pressure sensor, based on MEMS technology, is proposed and experimentally verified. The Faber–Perot cavity of the pressure sensor is formed by the anodic bonding of a sensitive silicon diaphragm and a Pyrex glass; a high-fineness interference signal is obtained by coating the interface surface with a high-reflection film, so as to simplify the signal demodulation system. The experimental results show that the pressure sensitivity of this sensor is 55.468 nm/MPa, and the temperature coefficient is 0.01859 nm/°C at 25~300 °C. The fiber-optic pressure sensor has the following advantages: high fineness, high temperature tolerance, high consistency and simple demodulation, resulting in a wide application prospect in the field of high-temperature pressure testing.