Zheda Ning

Mr. Zheda Ning

orcid

Research Focus & Metrics

Academic Career Length

5Years (2022-Present)

(Calculated once Scilit publication data is synced: current year − year of first publication + 1)

Representative Publications

View All Publications
6 February 2023 in Vacuum
Verified
Journal Article
Closed access
ZNZheda Ning
Zheda Ning
YWYiqing Wang
Yiqing Wang
SLSixie Li
Sixie Li
KTKe Tang
Ke Tang
MWMing Wen
Ming Wen

15 September 2022 in Metals
Verified
Journal Article
Open access
PDF file
ZNZheda Ning
Zheda Ning
QWQunshou Wang
Qunshou Wang
DZDong Zhao
Dong Zhao
WPWenli Pei
Wenli Pei
MWMing Wen
Ming Wen
Sputtering target is commonly used in semiconductor manufacturing for the preparation of thin films. Cold rolling and annealing treatment of bulk Ag is the routine process to prepare Ag sputtering target. In this paper, the microstructure evolution of Ag after cold rolling and annealing treatment was studied, and the results showed that annealing temperature affects the recrystallized structure of Ag and that 600 °C/1 h treatment can achieve complete recrystallization. At the same time, the texture evolution was also observed and discussed.