This study presents a novel impact piezoelectric motor that excites double stators through a sinusoidal signal. A sawtooth signal drives the traditional impact piezoelectric actuator, and its working frequency is limited by the resonant frequency. This study uses sine signals to drive the double stators to produce a sinusoidal vibration. The sinusoidal vibration of different frequencies and amplitudes are synthesised into a sawtooth vibration on the stage plate. The directional movement of the slider is realised using the vibration of the stage plate to drive the slider. This structure reduces the space required for the piezoelectric actuator to work. The working principle of the motor is discussed, and the structure is constructed. The dynamics model of the whole system is established on the based of the dynamics model of the actuator and the LuGre friction model. Moreover, the dynamics model was simulated and analysed through MATLAB/Simulink. The prototype is fabricated and tested. Experimental results confirm the effectiveness of using sinusoidal signals to drive the piezoelectric actuator, and the motion process of the piezoelectric motor is consistent with the theoretical analysis. The maximum speed of the piezoelectric actuator is 5.54 mm s ⁻¹ , and the resolution is 0.72 μ m. This study provides an effective driving method for the quasi-static piezoelectric motor to improve the working frequency.

Unknown micro-contact forces may affect operation accuracy in micro-operation technology and high-precision contact measurement. Existing micro force sensors are unable to meet the demand for high resolution, large range, and low cost. Therefore, a more economical solution for high-precision force measurement is needed. A high-precision optical force sensor (OPFS) with a simple sensing principle is proposed in this study. The OPFS is mainly composed of a laser diode, a force-sensitive structure, and a four-quadrant photodetector (QPD). When force is applied to the measuring platform, the force-sensitive structure produces the corresponding elastic deformation, which is sensed by the QPD. The multi-range and customized resolution of the OPFS can be achieved by adjusting the stiffness of the force-sensitive structure. The design and optimization of the OPFS are completed via theoretical modeling and simulation analysis. The performance of the OPFS is examined experimentally. The OPFS is found to have a sensitivity of 0.27 mV/ $\mu \text{N}$ , a measuring range of 0–2.71 mN, and a resolution of $32\mu \text{N}$ . The measurement uncertainty of the OPFS due to nonlinearity, resolution, repeatability, and drift is $82\mu \text{N}$ . The effectiveness of the OPFS in the measurement of micro-forces is verified. Finally, the OPFS is used to measure the contact force of a micro/nano contact probe. The results show that OPFS can be used for force calibration in micro/nano contact measurement instruments.

A dual stage tuning fork transducer (DSTFT) is designed as a stator for a resonant-type inertial linear motor. The first- and second-layer resonant frequencies of DSTFT are automatically adjusted with a ratio of 1:2 by using an ANSYS optimization design algorithm, and a resonant-type sawtooth-shaped mechanical waveform is generated by composing the two resonant vibrations of DSTFT. An inertial linear motor prototype is fabricated and tested. Experimental results confirmed the effectiveness of the designed transducer. The no-load maximum speed is 21.5 mm/s with a driving voltage of 67.2 V_p-p at a base frequency of 2831 Hz. The linear speed is 10.5 mm/s, and the drag load is 0.02 N at a preload force of 1 N and a driving voltage of 114 V_p-p for the base frequency. The movement direction could be reversed by changing the driving voltage phase.

This study designs, fabricates and tests a piezoelectric pump with the structure of a polystyrene ball check valve. The structure of the check valve consists of three layers of specially designed polymethylmethacrylate plates and six polystyrene balls, which forms a particular three-layer constraint mechanism to limit the lateral and vertical displacement of the balls. The assembly of the ball valve can be completed with a simple placing operation, which simplifies the assembly process of the entire pump. The balls are lightweight, which is beneficial for working at high frequencies. The current design adopts two compressible spaces, and the equivalent analogue circuit of compressible spaces is established and analysed. Experimental results indicate that compressible spaces can alleviate the burden in the actuator and smoothen the flow rate pulsation in the long flow channel. The theoretical analysis and experimental tests reveal that this new piezoelectric pump is self-priming. A high flow rate of 99.6 mL/min and the maximum back pressure of 15.3 kPa are obtained when the pump is driven with a sinusoidal voltage of 448 V_pp at the resonant frequency of 790 Hz.

A novel single-mode miniature standing wave ultrasonic motor (SUSM) is proposed. The SUSM uses the first extension vibration mode and second extension vibration mode of the stator to generate different diagonal vibration trajectories and drive the rotor to rotate in different directions through a single-phase signal. The bidirectional motion of the SUSM can be realised by switching the two vibration modes and excitation methods. The motor is designed and the operating principle is analysed. The resonant frequencies of the two vibration modes are determined by the finite element simulated analysis, and the transient analysis is adopted to obtain the diagonal trajectories of the driving part. Finally, a prototype of the single-mode SUSM is developed and the mechanical performance of the prototype is measured and evaluated. According to the experimental results, the motor has a no-load speed of 265.37 rpm (B1 mode) and 320.20 rpm (B2 mode) in each direction under 200 V_p−p and 100 V_p−p voltage excitation, and the maximum load is 60 mN and 70 mN, respectively.