Acoustic detection is of great significance because of its wide applications. This paper reports a Micro-Electro-Mechanical System (MEMS) acoustic sensor based on grating interferometer. In the MEMS structure, a diaphragm and a micro-grating made up the interference cavity. A short-cavity structure was designed and fabricated to reduce the impact of temperature on the cavity length in order to improve its stability against environment temperature variations. Besides this, through holes were designed in the substrate of the grating to reduce the air damping of the short-cavity structure. A silicon diaphragm with a 16.919 µm deep cavity and 2.4 µm period grating were fabricated by an improved MEMS process. The fabricated sensor chip was packaged on a conditioning circuit with a laser diode and a photodetector for acoustic detection. The output voltage signal in response to an acoustic wave is of high quality. The sensitivity of the acoustic sensor is up to −15.14 dB re 1 V/Pa @ 1 kHz. The output signal of the high-stability acoustic sensor almost unchanged as the environment temperature ranged from 5 °C to 55 °C.

A compact low-temperature cross-talk all-fibre ultrasonic sensor based on quadrature point phase step is proposed and experimentally demonstrated for the detection of high-intensity focused ultrasound (HIFU). The end facet of the graded index fibre was microfabricated with a 3μ/2 phase step, which forms an ultra-compact two-wave interferometer. The ultrasonic wave front can be simply detected with phase-front modulation. The all-fibre configuration allows the sensor to detect the HIFU field at a high intensity level. More importantly, the proposed sensor is virtually temperature-independent due to the ultra-thin phase step. The experimental results show that the ultrasonic sensor has a sensitivity of 324mV/MPa, and the standard variation of the temperature cross-sensitivity is only 1.7%. The proposed fibre sensor is expected to have potential applications in HIFU detection due to its tolerance at high intensity levels and low-temperature cross-sensitivity.

A gold-silver alloy film based spectral surface plasmon resonance imaging (SPRi) sensor has been prepared for in-situ quantitative detection of biochemical analytes at the sensor surface. This novel sensor has lower detection cost yet higher sensitivity relative to the conventional counterpart with a gold film. Using the laboratory-made multifunctional SPR sensing platform, both the resonant color images and the resonant spectra for the Au-Ag alloy film were measured at different incident angles. The quantitative relationship between the resonant wavelength and the average hue of corresponding resonant color image was established. With this relationship the most hue-sensitive spectral range was determined. After setting the initial resonant wavelength in the hue-sensitive spectral range, the refractive-index sensitivity of the Au-Ag alloy film based SPRi sensor was measured as Δhue/Δn_c = 29,879/RIU, being 8 times higher than that obtained with the gold-film SPRi sensor. The immunodetection of benzo(a)pyrene (BaP) in water was fulfilled using the Au-Ag alloy film based SPRi sensor. The average hue of the SPR color image linearly increases with increasing the BaP concentration up to C = 0.5 μg/L and the slope is Δhue/ΔC = 132.2/(μg/L). The sensor is responsive to a change of BaP concentration as low as ΔC = 0.01 μg/L.