Amr Kamel

Amr Kamel


Research Focus & Metrics

Academic Career Length

5Years (2022-Present)

(Calculated once Scilit publication data is synced: current year − year of first publication + 1)

Representative Publications

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5 August 2022 in Actuators
Verified
Journal Article
Open access
PDF file
AKAmr Kamel
Amr Kamel
SKSamed Kocer
Samed Kocer
LMLyazzat Mukhangaliyeva
Lyazzat Mukhangaliyeva
RSResul Saritas
Resul Saritas
AGAhmet Gulsaran
Ahmet Gulsaran
Eihab Abdel-RahmanEihab Abdel-Rahman
Eihab Abdel-Rahman
A novel MEMS continuous deformable mirror (DM) is presented. The mirror can be integrated into optical systems to compensate for monochromatic and chromatic aberrations. It is comprised of a 1.6 mm circular plate supported by eight evenly spaced flexural springs. Unlike traditional bias actuated DMs, it uses resonant electrostatic actuation (REA) to realize low- and high-order Zernike modes with a single drive signal. Instead of the hundreds or thousands of electrodes deployed by traditional DMs, the proposed DM employs only 49 electrodes and eliminates the need for spatial control algorithms and associated hardware, thereby providing a compact low-cost alternative. It also exploits dynamic amplification to reduce power requirements and increase the stroke by driving the DM at resonance. The DM was fabricated using a commercial silicon-on-insulator (SOI) MEMS process. Experimental modal analysis was carried out using laser Doppler vibrometry (LDV) to identify mode shapes of the DM and their natural frequencies. We are able to observe all of the lowest eight Zernike modes.