The AlTiVCuN coatings were deposited by magnetron sputtering with anode layer ion source (ALIS) assistance, and the microstructure and mechanical properties were significantly affected by the ion source power. With increasing the ion source power from 0 to 1.0 kW, the deposition rate decreased from 2.6 to 2.1 nm/min, and then gradually increased to 4.0 nm/min at 3.0 kW, and the surface roughness gradually decreased from 28.7 nm at 0 kW to 9.0 nm at 3.0 kW. Due to the enhanced ion bombardment effect, the microstructure of the coatings changed from a coarse into a dense columnar structure at 1.0 kW, and the grain size increased at higher ion source powers. All the coatings exhibited c-TiAlVN phase, and the preferred orientation changed from the (220) to the (111) plane at 3.0 kW. Due to the low Cu contents (1.0~3.1 at.%), the Cu atoms existed as an amorphous phase in the coatings. Due to the microstructure densification and high residual stress, the highest hardness of 32.4 GPa was achieved for the coating deposited at 1.0 kW.

Due to the excellent lubricity of V₂O₅ and soft metals, V and Cu have been added to Mo-N based coatings to further improve the tribological properties. In this study, the Mo-V-Cu-N coatings were deposited by high power impulse magnetron sputtering (HIPIMS). The effects of V and Cu on the microstructure and mechanical properties of Mo-N coatings were investigated. With increasing V/Cu content ratio, the deposition rate decreased from 15.4 to 6.5 nm/min, and the microstructure transformed from a featureless structure into a dense columnar structure. At low Cu contents, less than 6.5 at.%, the Mo-V-Cu-N coatings exhibited a single solid solution phase of c-Mo₂(V)N. When the Cu content reached 29.7 at.%, the Mo₄₅V₁Cu₃₀N₂₄ coating showed the lowest surface roughness of 2.0 nm, and the coating changed into a double-phase of c-Mo₂(V)N and c-Cu. The adhesion strength gradually increased from 32.2 to 87.8 N with an increasing V/Cu content ratio. Due to the microstructure densification, a maximum hardness of 27.3 GPa was achieved for the Mo₄₆V₁₅Cu₁N₃₈ coating, which was accompanied by a high compressive residual stress.