The current demand for fabricating optical and photonic devices displaying high performance, using low-cost and time-saving methods, prompts femtosecond (fs)-laser processing as a promising methodology. High and low repetition femtosecond lasers enable surface and/or bulk modification of distinct materials, which can be used for applications ranging from optical waveguides to superhydrophobic surfaces. Herein, some fundamental aspects of fs-laser processing of materials, as well as the basics of their most common experimental apparatuses, are introduced. A survey of results on polymer fs-laser processing, resulting in 3D waveguides, electroluminescent structures and active hybrid-microstructures for luminescence or biological microenvironments is presented. Similarly, results of fs-laser processing on glasses, gold and silicon to produce waveguides containing metallic nanoparticles, analytical chemical sensors and surface with modified features, respectively, are also described. The complexity of fs-laser micromachining involves precise control of material properties, pushing ultrafast laser processing as an advanced technique for micro/nano devices.

We investigated the effect of temporal shaped femtosecond pulses on silicon laser micromachining. By using sinusoidal spectral phases, pulse trains composed of sub-pulses with distinct temporal separations were generated and applied to the silicon surface to produce Laser Induced Periodic Surface Structures (LIPSS). The LIPSS obtained with different sub-pulse separation were analyzed by comparing the intensity of the two-dimensional fast Fourier Transform (2D-FFT) of the AFM images of the ripples (LIPSS). It was observed that LIPSS amplitude is more emphasized for the pulse train with sub-pulses separation of 128 fs, even when compared with the Fourier transform limited pulse. By estimating the carrier density achieved at the end of each pulse train, we have been able to interpret our results with the Sipe-Drude model, that predicts that LIPSS efficacy is higher for a specific induced carrier density. Hence, our results indicate that temporal shaping of the excitation pulse, performed by spectral phase modulation, can be explored in fs-laser microstructuring.