The piezoelectric MEMS (micro-electro-mechanical systems) scanning mirrors are in a great demand for numerous optoelectronic applications. However, the existing actuation strategies are severely limited for poor compatibility with CMOS process, non-linear control, insufficient mirror size and small angular travel. In this paper, a novel, particularly efficient ScAlN-based piezoelectric MEMS mirror with a pupil size of 10 mm is presented. The MEMS mirror consists of a reflection mirror plate, four meandering springs with mechanical rotation transformation, and eight right-angle trapezoidal actuators designed in Union Jack-shaped form. Theoretical modeling, simulations and comparative analysis have been investigated for optimizing two different device designs. For Device A with a 1 mm-length square mirror, the orthogonal and diagonal static tilting angles are ±36.2°@200 V_DC and ±36.2°@180 V_DC, respectively, and the dynamic tilting angles increases linearly with the driving voltage. Device B with a 10 mm-length square mirror provides the accessible tilting angles of ±36.0°@200 V_DC and ±35.9°@180 V_DC for horizontal and diagonal actuations, respectively. In the dynamic actuation regime, the orthogonal and diagonal tilting angles at 10 Hz are ±8.1°/V_pp and ±8.9°/V_pp, respectively. This work confirmed that the Union Jack-shaped arrangement of trapezoidal actuators is a promising option for designing powerful optical devices.

Butt welding is extensively applied in long-distance oil and gas pipelines, and it is of great significance to conduct non-destructive ultrasonic testing of girth welds in order to avoid leakage and safety accidents during pipeline production and operation. In view of the limitations of large transducer size, single fixed beam angle, low detection resolution and high cost of conventional ultrasonic inspection technologies, a 16-channel piezoelectric micro ultrasonic transducer (PMUT) array probe was developed through theoretical analysis and structural optimization design. After the probe impedance characterization, the experimental results show that the theoretical model can effectively guide the design of the ultrasonic transducer array, offering the maximum operating frequency deviation of less than 5%. The ultrasonic echo performance tests indicate that the average −6 dB bandwidth of the PMUT array probe can be up to 77.9%. In addition, the fabricated PMUT array probe has been used to successfully detect five common internal defects in pipeline girth welds. Due to the multiple micro array elements, flexible handling of each element, large bandwidth and high resolution of defect detection, the designed PMUT array probe can provide a good application potential in structural health monitoring and medical ultrasound imaging fields.