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In this study, NbTaMoW medium-entropy alloy films were prepared using a cosputtering apparatus with four sputter guns. Pure-element targets were used for sputtering. The rotational speeds of the substrate holder (RS) were 1–30 rpm. Lower RS values resulted in the formed films exhibiting a multilayer stacked structure with a cyclical gradient concentration. The crystalline phases, mechanical properties, and oxidation behavior of the prepared NbTaMoW films were investigated. The uniformity of the prepared multilayered alloy films increased with the RS value. The monolithic NbTaMoW alloy films prepared at 30 rpm exhibited a single body-centered cubic (BCC) phase, hardness of 12.9 GPa, and Young’s modulus of 278 GPa. The BCC phase evolved into a combination of multiple BCC phases when RS was <10 rpm. The multilayered NbTaMoW alloy films prepared at 10 rpm exhibited high hardness of 14.1 GPa and a comparable Young’s modulus of 274 GPa. The prepared NbTaMoW films exhibited activation energy of 104 kJ/mol at 350–600 °C in air, and MoO3 was volatilized at temperatures of ≥550 °C. The monolithic and multilayered NbTaMoW films with a thickness of approximately 1240 nm were completely oxidized after annealing at 600 °C for 2 h.
Yung-I Chen; Chun-Yen Chen; Li-Chun Chang; Wu Kai. Characterization of cosputtered NbTaMoW films. Journal of Materials Research and Technology 2021, 1 .
AMA StyleYung-I Chen, Chun-Yen Chen, Li-Chun Chang, Wu Kai. Characterization of cosputtered NbTaMoW films. Journal of Materials Research and Technology. 2021; ():1.
Chicago/Turabian StyleYung-I Chen; Chun-Yen Chen; Li-Chun Chang; Wu Kai. 2021. "Characterization of cosputtered NbTaMoW films." Journal of Materials Research and Technology , no. : 1.
In this study, the feasibility of using ZrO2 coatings, fabricated through the atmospheric pressure plasma jet technique, as top coats in thermal barrier systems was explored. Inconel 617 was used as the substrate material, and sputtered laminated RuAl/RuAlZr/Ru was used as the bond coat. >20-μm-thick ZrO2 coatings were deposited through several iterations of deposition at 500 °C and annealing at 600 °C; here, ZrO2 existed in the tetragonal phase. The tetragonal ZrO2 was stable after annealing at up to 700 °C but transformed into a mixture of tetragonal and monoclinic ZrO2 phases when annealed at >800 °C. The thermal stability of the ZrO2/RuAl/RuAlZr/Ru/Inconel 617 assembly was evaluated at 800–900 °C in air. The variations in volumetric fractions of the tetragonal and monoclinic ZrO2 phases were recorded; 44% of the tetragonal phase remained after 100 h of annealing at 800 °C, whereas 80% of the tetragonal phase had transformed into the monoclinic phase after 4 h of annealing at 900 °C. Observation of BC after annealing at 800 °C indicated that a dense thermally grown oxide scale, comprising O and Al, formed between the ZrO2 and RuAl layers, which impeded the inward diffusion of O. The inhibition of O diffusion declined with the crystallization of the thermally grown oxide scale into the δ-Al2O3 phase when the annealing time was extended.
Rong-Tan Huang; Yi-En Ke; Ting-En Lu; Yung-I Chen. Thermal stability of atmospheric pressure plasma jet-deposited ZrO2 top coats and sputtered RuAl/RuAlZr/Ru bond coats on Inconel 617. Journal of Materials Research and Technology 2020, 10, 460 -470.
AMA StyleRong-Tan Huang, Yi-En Ke, Ting-En Lu, Yung-I Chen. Thermal stability of atmospheric pressure plasma jet-deposited ZrO2 top coats and sputtered RuAl/RuAlZr/Ru bond coats on Inconel 617. Journal of Materials Research and Technology. 2020; 10 ():460-470.
Chicago/Turabian StyleRong-Tan Huang; Yi-En Ke; Ting-En Lu; Yung-I Chen. 2020. "Thermal stability of atmospheric pressure plasma jet-deposited ZrO2 top coats and sputtered RuAl/RuAlZr/Ru bond coats on Inconel 617." Journal of Materials Research and Technology 10, no. : 460-470.
The reactive gas flow ratio and substrate bias voltage are crucial sputtering parameters for fabricating transition metal nitride films. In this study, W–N films were prepared using sputtering with nitrogen flow ratios (f) of 0.1–0.5. W–N and W–Si–N films were then prepared using an f level of 0.4 and substrate bias varying from 0 to −150 V by using sputtering and co-sputtering, respectively. The variations in phase structures, bonding characteristics, mechanical properties, and wear resistance of the W–N and W–Si–N films were investigated. The W–N films prepared with nitrogen flow ratios of 0.1–0.2, 0.3, and 0.4–0.5 displayed crystalline W, amorphous W–N, and crystalline W2N, respectively. The W–N films prepared using a nitrogen flow ratio of 0.4 and substrate bias voltages of −50 and −100 V exhibited favorable mechanical properties and high wear resistance. The mechanical properties of the amorphous W–Si–N films were not related to the magnitude of the substrate bias.
Li-Chun Chang; Ming-Ching Sung; Li-Heng Chu; Yung-I Chen. Effects of the Nitrogen Flow Ratio and Substrate Bias on the Mechanical Properties of W–N and W–Si–N Films. Coatings 2020, 10, 1252 .
AMA StyleLi-Chun Chang, Ming-Ching Sung, Li-Heng Chu, Yung-I Chen. Effects of the Nitrogen Flow Ratio and Substrate Bias on the Mechanical Properties of W–N and W–Si–N Films. Coatings. 2020; 10 (12):1252.
Chicago/Turabian StyleLi-Chun Chang; Ming-Ching Sung; Li-Heng Chu; Yung-I Chen. 2020. "Effects of the Nitrogen Flow Ratio and Substrate Bias on the Mechanical Properties of W–N and W–Si–N Films." Coatings 10, no. 12: 1252.
In this study, TaAl multilayer films were cosputtered on Inconel 617 through cyclical gradient concentration deposition. The oxidation behavior of the TaAl films and the interdiffusion between the TaAl films and Inconel 617 were evaluated through thermogravimetric analysis, X-ray diffraction, transmission electron microscopy, and Auger electron spectroscopy after the films were annealed in air at 400–800 °C. The results indicated that the Ta0.79Al0.21 multilayer films had a low O content even though O diffused inward through the entire film thickness after 8 h of annealing at 800 °C, which was attributed to the formation of an Al oxide scale due to the outward diffusion of Al in the initial oxidation stage. This under-stoichiometric Al2O3/Ta2O5 structure caused the produced films to exhibit a high hardness of 23.2 GPa and a high Young's modulus of 316 GPa. Moreover, the outward diffusion of Inconel 617 elements, namely Ni and Cr, was restricted by the oxidized films. However, the high Ta content in the TaAl films deteriorated the film adherence to the substrates due to a high volume ratio of Ta2O5/Ta. Furthermore, laminated Ta0.79Al0.21/Ta0.34Al0.66/Ti films were fabricated to improve the film–substrate adhesion. These films exhibited a high hardness of 17.1 GPa after annealing at 800 °C for 24 h.
Yi-En Ke; Li-Chun Chang; Wu Kai; Yung-I Chen. Oxidation behavior and interdiffusion of Ta Al multilayer films and Inconel 617 alloy. Surface and Coatings Technology 2020, 405, 126684 .
AMA StyleYi-En Ke, Li-Chun Chang, Wu Kai, Yung-I Chen. Oxidation behavior and interdiffusion of Ta Al multilayer films and Inconel 617 alloy. Surface and Coatings Technology. 2020; 405 ():126684.
Chicago/Turabian StyleYi-En Ke; Li-Chun Chang; Wu Kai; Yung-I Chen. 2020. "Oxidation behavior and interdiffusion of Ta Al multilayer films and Inconel 617 alloy." Surface and Coatings Technology 405, no. : 126684.
The feasibility of using Ru–Si–Zr multilayer and laminated Ru–Al/Ru–Si–Zr multilayer coatings as bond coats of thermal barrier systems for Inconel 617 was investigated by annealing the coatings at 800 °C in ambient air. The multilayer coatings were fabricated through the deposition of a cyclical gradient concentration by using cosputtering. The thermal stability of the annealed coatings was examined using X-ray diffraction, transmission electron microscopy, and Auger electron spectroscopy. The results indicated that Ru–Si–Zr multilayer coatings restricted the outward diffusion of metallic elements from Inconel 617 substrates, and an additional coating of an Ru-Al multilayer above the Ru–Si–Zr multilayer restricted the inward diffusion of oxygen from ambient air.
Yung-I Chen; Hsing-Hao Lo; Yi-En Ke. Thermal stability of laminated Ru–Al/Ru–Si–Zr coatings on Inconel 617. Surface and Coatings Technology 2020, 399, 126194 .
AMA StyleYung-I Chen, Hsing-Hao Lo, Yi-En Ke. Thermal stability of laminated Ru–Al/Ru–Si–Zr coatings on Inconel 617. Surface and Coatings Technology. 2020; 399 ():126194.
Chicago/Turabian StyleYung-I Chen; Hsing-Hao Lo; Yi-En Ke. 2020. "Thermal stability of laminated Ru–Al/Ru–Si–Zr coatings on Inconel 617." Surface and Coatings Technology 399, no. : 126194.
ZrNx (x = 0.67–1.38) films were fabricated through direct current magnetron sputtering by a varying nitrogen flow ratio [N2/(Ar + N2)] ranging from 0.4 to 1.0. The structural variation, bonding characteristics, and mechanical properties of the ZrNx films were investigated. The results indicated that the structure of the films prepared using a nitrogen flow ratio of 0.4 exhibited a crystalline cubic ZrN phase. The phase gradually changed to a mixture of crystalline ZrN and orthorhombic Zr3N4 followed by a Zr3N4 dominant phase as the N2 flow ratio increased up to >0.5 and >0.85, respectively. The bonding characteristics of the ZrNx films comprising Zr–N bonds of ZrN and Zr3N4 compounds were examined by X-ray photoelectron spectroscopy and were well correlated with the structural variation. With the formation of orthorhombic Zr3N4, the nanoindentation hardness and Young’s modulus levels of the ZrNx (x = 0.92–1.38) films exhibited insignificant variations ranging from 18.3 to 19.0 GPa and from 210 to 234 GPa, respectively.
Yi-En Ke; Yung-I Chen. Effects of Nitrogen Flow Ratio on Structures, Bonding Characteristics, and Mechanical Properties of ZrNx Films. Coatings 2020, 10, 476 .
AMA StyleYi-En Ke, Yung-I Chen. Effects of Nitrogen Flow Ratio on Structures, Bonding Characteristics, and Mechanical Properties of ZrNx Films. Coatings. 2020; 10 (5):476.
Chicago/Turabian StyleYi-En Ke; Yung-I Chen. 2020. "Effects of Nitrogen Flow Ratio on Structures, Bonding Characteristics, and Mechanical Properties of ZrNx Films." Coatings 10, no. 5: 476.
Glass molding is widely used for manufacturing high-precision optical elements. Nitride coatings are recommended as protective coatings on glass molding dies. In a die-fixed glass molding system, the molding dies undergo rapid thermal shocks. In this study, near-amorphous Cr–Si–N, Ta–Si–N, and Zr–Si–N coatings with a Si concentration of >14 at.% were prepared. The feasibility of these coatings in the glass molding process was evaluated through rapid thermal cycling annealing in a 15-ppm O2–N2 atmosphere. The cycling annealing test was performed at 270 °C and 580 °C or 600 °C. The heating, holding, and cooling times in the annealing process were 1 min each. The results indicated that Zr–Si–N coatings exhibited superior anti-sticking against SiO2–B2O3–BaO-based glass. The reactions between the nitride coatings and glass were investigated.
Yung-I Chen; Yi-En Ke; Ming-Ching Sung; Li-Chun Chang. Rapid thermal annealing of Cr–Si–N, Ta–Si–N, and Zr–Si–N coatings in glass molding atmospheres. Surface and Coatings Technology 2020, 389, 125662 .
AMA StyleYung-I Chen, Yi-En Ke, Ming-Ching Sung, Li-Chun Chang. Rapid thermal annealing of Cr–Si–N, Ta–Si–N, and Zr–Si–N coatings in glass molding atmospheres. Surface and Coatings Technology. 2020; 389 ():125662.
Chicago/Turabian StyleYung-I Chen; Yi-En Ke; Ming-Ching Sung; Li-Chun Chang. 2020. "Rapid thermal annealing of Cr–Si–N, Ta–Si–N, and Zr–Si–N coatings in glass molding atmospheres." Surface and Coatings Technology 389, no. : 125662.
HfNx (x = 0.81–2.07) films were fabricated through direct current magnetron sputtering by varying nitrogen flow ratio [N2/(Ar + N2)] from 0.1 to 1.0. The structural evolution, mechanical properties, and bonding characteristics of the as-deposited HfNx films were investigated for various values of the stoichiometric variable x. The results indicated that the films prepared using nitrogen flow ratios lower than 0.2 and higher than 0.4 exhibited crystalline and near-amorphous structures, respectively. The highest level of the nanoindentation hardness of the near-stoichiometric Hf51N49 films prepared using a nitrogen flow ratio of 0.2 was 26.0 GPa. Further increases to the x value of HfNx films decreased the hardness levels, which could be attributed to higher Hf3N4 content. The bonding constitutions comprised metallic Hf, HfN bonds of HfN and Hf3N4, and HfO bonds. The amounts of HfN bonds in Hf3N4 structure increased as x increased. The thermal stability values of the HfNx films at 500 and 600 °C in a 15-ppm O2–N2 atmosphere were evaluated.
Yi-En Ke; Yung-I Chen. Mechanical properties, bonding characteristics, and thermal stability of magnetron-sputtered HfN films. Surface and Coatings Technology 2020, 388, 125575 .
AMA StyleYi-En Ke, Yung-I Chen. Mechanical properties, bonding characteristics, and thermal stability of magnetron-sputtered HfN films. Surface and Coatings Technology. 2020; 388 ():125575.
Chicago/Turabian StyleYi-En Ke; Yung-I Chen. 2020. "Mechanical properties, bonding characteristics, and thermal stability of magnetron-sputtered HfN films." Surface and Coatings Technology 388, no. : 125575.
Ta–Al multilayer coatings were fabricated through cyclical gradient concentration deposition by direct current magnetron co-sputtering. The as-deposited coatings presented a multilayer structure in the growth direction. The oxidation behavior of the Ta–Al multilayer coatings was explored. The results specified that Ta-rich Ta–Al multilayer coatings demonstrated a restricted oxidation depth after annealing at 600 °C in 1% O2–99% Ar for up to 100 h. This was attributed to the preferential oxidation of Al, the formation of amorphous Al-oxide sublayers, and the maintenance of a multilayer structure. By contrast, Ta2O5 formed after exhausting Al in the oxidation process in an ambient atmosphere at 600 °C which exhibited a crystalline Ta2O5-amorphous Al-oxide multilayer structure.
Yung-I Chen; Nai-Yuan Lin; Yi-En Ke. Oxidation Behavior of Ta–Al Multilayer Coatings. Coatings 2019, 9, 810 .
AMA StyleYung-I Chen, Nai-Yuan Lin, Yi-En Ke. Oxidation Behavior of Ta–Al Multilayer Coatings. Coatings. 2019; 9 (12):810.
Chicago/Turabian StyleYung-I Chen; Nai-Yuan Lin; Yi-En Ke. 2019. "Oxidation Behavior of Ta–Al Multilayer Coatings." Coatings 9, no. 12: 810.
Zr-Si-N films with atomic ratios of N/(Zr + Si) of 0.54-0.82 were fabricated through high-power impulse magnetron sputtering (HiPIMS)-radio-frequency magnetron sputtering (RFMS) cosputtering by applying an average HiPIMS power of 300 W on the Zr target, various RF power levels on the Si target, and negative bias voltage levels of 0-150 V connected to the substrate holder. Applying a negative bias voltage on substrates enhanced the ion bombardment effect, which affected the chemical compositions, mechanical properties, and residual stress of the Zr-Si-N films. The results indicated that Zr-Si-N films with Si content ranging from 1.4 to 6.3 atom % exhibited a high hardness level of 33.2-34.6 GPa accompanied with a compressive stress of 4.3-6.4 GPa, an H/E* level of 0.080-0.107, an H3/E*2 level of 0.21-0.39 GPa, and an elastic recovery of 62-72%.
Yung-I Chen; Yu-Zhe Zheng; Li-Chun Chang; Yu-Heng Liu. Effect of Bias Voltage on Mechanical Properties of HiPIMS/RFMS Cosputtered Zr-Si-N Films. Materials 2019, 12, 2658 .
AMA StyleYung-I Chen, Yu-Zhe Zheng, Li-Chun Chang, Yu-Heng Liu. Effect of Bias Voltage on Mechanical Properties of HiPIMS/RFMS Cosputtered Zr-Si-N Films. Materials. 2019; 12 (17):2658.
Chicago/Turabian StyleYung-I Chen; Yu-Zhe Zheng; Li-Chun Chang; Yu-Heng Liu. 2019. "Effect of Bias Voltage on Mechanical Properties of HiPIMS/RFMS Cosputtered Zr-Si-N Films." Materials 12, no. 17: 2658.
Cr–Si–N coatings were prepared through reactive direct current magneton sputtering using a high N2/Ar flow ratio of 1. The addition of Si to improve the mechanical properties and oxidation resistance of Cr–N coatings was examined. The results indicated that the Cr–Si–N coatings with an Si content of 50 at % exhibited a cubic CrN phase with a columnar structure, whereas the coatings with 14 at % Si comprised of a nanocomposite structure, and the coatings with 16–18 at % Si were near-amorphous. The nanocomposite Cr32Si14N54 coating possessed hardness and Young’s modulus values of 17 and 209 GPa, respectively, accompanied with a hardness to effective Young’s modulus (H/E*) value of 0.077 and an elastic recovery (We) level of 55%—all the properties were highest within the as-deposited coating. The addition of Si was also beneficial to reduce the surface roughness and improve the oxidation resistance.
Li-Chun Chang; Yu-Heng Liu; Yung-I Chen. Mechanical Properties and Oxidation Behavior of Cr–Si–N Coatings. Coatings 2019, 9, 528 .
AMA StyleLi-Chun Chang, Yu-Heng Liu, Yung-I Chen. Mechanical Properties and Oxidation Behavior of Cr–Si–N Coatings. Coatings. 2019; 9 (8):528.
Chicago/Turabian StyleLi-Chun Chang; Yu-Heng Liu; Yung-I Chen. 2019. "Mechanical Properties and Oxidation Behavior of Cr–Si–N Coatings." Coatings 9, no. 8: 528.
Ru–Al–Zr multilayer coatings with a Ru interlayer were fabricated through cyclical gradient concentration deposition by using direct current magnetron cosputtering on Inconel 617 substrates. The thermal stability of these Ru–Al–Zr coatings after annealing at 800 °C in ambient air was investigated through X-ray diffraction, Auger electron spectroscopy, and transmission electron microscopy. A multilayered structure of the Ru–Al–Zr coatings was maintained, transformed to small grains, and grew into large grains as the annealing duration was increased from 30 min to 4 h, and then to 12 h, which was accompanied with the outward diffusion of Ni, Cr, and Co from Inconel 617 substrates. Moreover, the Ru–Al–Zr coatings could not prevent the inward diffusion of oxygen. With the deposition of a Ru–Al top coating, the laminated Ru–Al/Ru–Al–Zr coatings restricted the inward diffusion of oxygen by forming a continuous Al2O3 scale.
Yung-I Chen; Jia-Wei Jhang. Thermal stability of laminated Ru–Al/Ru–Al–Zr coatings on Inconel 617. Surface and Coatings Technology 2019, 361, 357 -363.
AMA StyleYung-I Chen, Jia-Wei Jhang. Thermal stability of laminated Ru–Al/Ru–Al–Zr coatings on Inconel 617. Surface and Coatings Technology. 2019; 361 ():357-363.
Chicago/Turabian StyleYung-I Chen; Jia-Wei Jhang. 2019. "Thermal stability of laminated Ru–Al/Ru–Al–Zr coatings on Inconel 617." Surface and Coatings Technology 361, no. : 357-363.
Monolithic Hf–Si–N coatings and multilayered Hf–Si–N coatings with cyclical gradient concentration were fabricated using reactive direct current magnetron cosputtering. The structure of the Hf–Si–N coatings varied from a crystalline HfN phase, to a mixture of HfN and amorphous phases and to an amorphous phase with continuously increasing the Si content. The multilayered Hf48Si3N49 coatings exhibited a mixture of face-centered cubic and near-amorphous phases with a maximal hardness of 22.5 GPa, a Young’s modulus of 244 GPa and a residual stress of −1.5 GPa. The crystalline phase-dominant coatings exhibited a linear relationship between the hardness and compressive residual stress, whereas the amorphous phase-dominant coatings exhibited a low hardness level of 15–16 GPa; this hardness is close to that of Si3N4. Various oxides were formed after annealing of the Hf–Si–N coatings at 600 °C in a 1% O2–99% Ar atmosphere. Monoclinic HfO2 formed after Hf54N46 annealing and amorphous oxide formed for the oxidation-resistant Hf32Si19N49 coatings. The oxidation behavior with respect to the Si content was investigated by using transmission electron microscopy and X-ray photoelectron spectroscopy.
Li-Chun Chang; Bo-Wei Liu; Yung-I Chen. Mechanical Properties and Oxidation Behavior of Multilayered Hf–Si–N Coatings. Coatings 2018, 8, 354 .
AMA StyleLi-Chun Chang, Bo-Wei Liu, Yung-I Chen. Mechanical Properties and Oxidation Behavior of Multilayered Hf–Si–N Coatings. Coatings. 2018; 8 (10):354.
Chicago/Turabian StyleLi-Chun Chang; Bo-Wei Liu; Yung-I Chen. 2018. "Mechanical Properties and Oxidation Behavior of Multilayered Hf–Si–N Coatings." Coatings 8, no. 10: 354.
Zr–Si–N films were fabricated through the co-deposition of high-power impulse magnetron sputtering (HiPIMS) and radio-frequency magnetron sputtering (RFMS). The mechanical properties of the films fabricated using various nitrogen flow rates and radio-frequency powers were investigated. The HiPIMS/RFMS co-sputtered Zr–Si–N films were under-stoichiometric. These films with Si content of less than 9 at.%, and N content of less than 43 at.% displayed a face-centered cubic structure. The films’ hardness and Young’s modulus exhibited an evident relationship to their compressive residual stresses. The films with 2–6 at.% Si exhibited high hardness of 33–34 GPa and high Young’s moduli of 346–373 GPa, which was accompanied with compressive residual stresses from −4.4 to −5.0 GPa.
Li-Chun Chang; Yu-Zhe Zheng; Yung-I Chen. Mechanical Properties of Zr–Si–N Films Fabricated through HiPIMS/RFMS Co-Sputtering. Coatings 2018, 8, 263 .
AMA StyleLi-Chun Chang, Yu-Zhe Zheng, Yung-I Chen. Mechanical Properties of Zr–Si–N Films Fabricated through HiPIMS/RFMS Co-Sputtering. Coatings. 2018; 8 (8):263.
Chicago/Turabian StyleLi-Chun Chang; Yu-Zhe Zheng; Yung-I Chen. 2018. "Mechanical Properties of Zr–Si–N Films Fabricated through HiPIMS/RFMS Co-Sputtering." Coatings 8, no. 8: 263.
Ru-riched and equiatomic Ru–Al multilayered thin films were fabricated on Si and Inconel 617 substrates. These thin films exhibited a multilayered structure that is caused by stacking cyclical gradient concentration through cosputtering. X-ray diffraction analysis indicated that the as-deposited Ru–Al multilayers comprised Ru and RuAl phases. Oxidation that is caused by annealing atmospheres and elements diffused from substrates was investigated. The results indicated that the inward diffusion of O at 600 °C in a 1% O2–99% Ar atmosphere was restricted by the formation of an amorphous Al-oxide sublayer, and inward diffusion of O at 800 °C in air was limited by the formation of a crystalline Al2O3 scale. Additionally, the outward diffusion of elements from Inconel 617 penetrated the unoxidized parts of the 800 °C–annealed Ru–Al multilayers.
Yung-I Chen; Zhi-Ting Zheng; Jia-Wei Jhang. Thermal Stability of Ru–Al Multilayered Thin Films on Inconel 617. Metals 2018, 8, 514 .
AMA StyleYung-I Chen, Zhi-Ting Zheng, Jia-Wei Jhang. Thermal Stability of Ru–Al Multilayered Thin Films on Inconel 617. Metals. 2018; 8 (7):514.
Chicago/Turabian StyleYung-I Chen; Zhi-Ting Zheng; Jia-Wei Jhang. 2018. "Thermal Stability of Ru–Al Multilayered Thin Films on Inconel 617." Metals 8, no. 7: 514.
High-Si-content transition metal nitride coatings, which exhibited an X-ray amorphous phase, were proposed as protective coatings on glass molding dies. In a previous study, the Zr–Si–N coatings with Si contents of 24–30 at.% exhibited the hardness of Si3N4, which was higher than those of the middle-Si-content (19 at.%) coatings. In this study, the bonding characteristics of the constituent elements of Zr–Si–N coatings were evaluated through X-ray photoelectron spectroscopy. Results indicated that the Zr 3d5/2 levels were 179.14–180.22 and 180.75–181.61 eV for the Zr–N bonds in ZrN and Zr3N4 compounds, respectively. Moreover, the percentage of Zr–N bond in the Zr3N4 compound increased with increasing Si content in the Zr–Si–N coatings. The Zr–N bond of Zr3N4 dominated when the Si content was >24 at.%. Therefore, high Si content can stabilize the Zr–N compound in the M3N4 bonding structure. Furthermore, the thermal stability and chemical inertness of Zr–Si–N coatings were evaluated by conducting thermal cycle annealing at 270 °C and 600 °C in a 15-ppm O2–N2 atmosphere. The results indicated that a Zr22Si29N49/Ti/WC assembly was suitable as a protective coating against SiO2–B2O3–BaO-based glass for 450 thermal cycles.
Li-Chun Chang; Yu-Zhe Zheng; Yung-I Chen; Shan-Chun Chang; Bo-Wei Liu. Bonding Characteristics and Chemical Inertness of Zr–Si–N Coatings with a High Si Content in Glass Molding. Coatings 2018, 8, 181 .
AMA StyleLi-Chun Chang, Yu-Zhe Zheng, Yung-I Chen, Shan-Chun Chang, Bo-Wei Liu. Bonding Characteristics and Chemical Inertness of Zr–Si–N Coatings with a High Si Content in Glass Molding. Coatings. 2018; 8 (5):181.
Chicago/Turabian StyleLi-Chun Chang; Yu-Zhe Zheng; Yung-I Chen; Shan-Chun Chang; Bo-Wei Liu. 2018. "Bonding Characteristics and Chemical Inertness of Zr–Si–N Coatings with a High Si Content in Glass Molding." Coatings 8, no. 5: 181.
Yung-I Chen; Yu-Xiang Gao; Li-Chun Chang; Yi-En Ke; Bo-Wei Liu. Mechanical properties, bonding characteristics, and oxidation behaviors of Nb–Si–N coatings. Surface and Coatings Technology 2018, 350, 831 -840.
AMA StyleYung-I Chen, Yu-Xiang Gao, Li-Chun Chang, Yi-En Ke, Bo-Wei Liu. Mechanical properties, bonding characteristics, and oxidation behaviors of Nb–Si–N coatings. Surface and Coatings Technology. 2018; 350 ():831-840.
Chicago/Turabian StyleYung-I Chen; Yu-Xiang Gao; Li-Chun Chang; Yi-En Ke; Bo-Wei Liu. 2018. "Mechanical properties, bonding characteristics, and oxidation behaviors of Nb–Si–N coatings." Surface and Coatings Technology 350, no. : 831-840.
Yung-I Chen; Yu-Xiang Gao; Li-Chun Chang. Oxidation behavior of Ta Si N coatings. Surface and Coatings Technology 2017, 332, 72 -79.
AMA StyleYung-I Chen, Yu-Xiang Gao, Li-Chun Chang. Oxidation behavior of Ta Si N coatings. Surface and Coatings Technology. 2017; 332 ():72-79.
Chicago/Turabian StyleYung-I Chen; Yu-Xiang Gao; Li-Chun Chang. 2017. "Oxidation behavior of Ta Si N coatings." Surface and Coatings Technology 332, no. : 72-79.
Yung-I Chen; Shan-Chun Chang; Li-Chun Chang. Oxidation resistance and mechanical properties of Zr–Si–N coatings with cyclic gradient concentration. Surface and Coatings Technology 2017, 320, 168 -173.
AMA StyleYung-I Chen, Shan-Chun Chang, Li-Chun Chang. Oxidation resistance and mechanical properties of Zr–Si–N coatings with cyclic gradient concentration. Surface and Coatings Technology. 2017; 320 ():168-173.
Chicago/Turabian StyleYung-I Chen; Shan-Chun Chang; Li-Chun Chang. 2017. "Oxidation resistance and mechanical properties of Zr–Si–N coatings with cyclic gradient concentration." Surface and Coatings Technology 320, no. : 168-173.
Li-Chun Chang; Yu-Zhe Zheng; Yu-Xiang Gao; Yung-I Chen. Mechanical properties and oxidation resistance of sputtered Cr–W–N coatings. Surface and Coatings Technology 2017, 320, 196 -200.
AMA StyleLi-Chun Chang, Yu-Zhe Zheng, Yu-Xiang Gao, Yung-I Chen. Mechanical properties and oxidation resistance of sputtered Cr–W–N coatings. Surface and Coatings Technology. 2017; 320 ():196-200.
Chicago/Turabian StyleLi-Chun Chang; Yu-Zhe Zheng; Yu-Xiang Gao; Yung-I Chen. 2017. "Mechanical properties and oxidation resistance of sputtered Cr–W–N coatings." Surface and Coatings Technology 320, no. : 196-200.