A metal–ceramic composite target for magnetron sputtering was fabricated for the first time by a robotic complex for the detonation spraying of coatings equipped with a multi-chamber detonation accelerator. A mixture of metal and ceramic NiCr/B₄C powders was sprayed onto the copper base of the cylindrical composite target cathode. The study of the structure of a metal–ceramic composite coating target using scanning electron microscopy showed that the coating material is dense without visible pores; the elemental composition is evenly distributed in the material. The study of the cathode sputtering area after deposition in the DC mode showed that there are uniform traces of annular erosion on the target surface. The obtained cathode target with an NiCr-70B₄C coating was used to deposit the NiB-Cr₇C₃ coating on flat specimens of 65G steel using equipment for magnetron sputtering UNICOAT 200. The coating was applied in the Direct Current mode. A dense NiB-Cr₇C₃ coating with a thickness of 2 μm was obtained. The NiB-Cr₇C₃ coating has a quasi-amorphous structure. The microstructures and concentration of oxygen and carbon impurities throughout the entire thickness of the coating were investigated by means of transmission electron microscopy. The results of the study show that the coatings have a nanocrystalline multi-phase structure. The microhardness of the NiB-Cr₇C₃ coating reached 10 GPa, and the adhesion fracture load exceeded 16 N. The results will open up new prospects for the further elaboration of technology for obtaining original composite cathodes for magnetron sputtering using detonation spraying of coatings.

TiN films synthesized on leucosapphire substrates by dual magnetron sputtering have been annealed in vacuum at 600, 700, 800, and 900°C for 2 min. The microstructure and morphology of the films have...

The issue of crystallization of silicon oxide at low temperatures is a topical issue for the electronics of the future. Organosilicon oligomers and polymers are “ideal” sources for obtaining ultrapure silicon ceramics and silicon nanoparticles. This paper presents the results of the synthesis of highly dispersed silicon-carbon powder from an organohydrosiloxane oligomer and the method for increasing its crystallinity at low temperatures. The diffraction pattern of the resulting powder corresponds to the amorphous–crystalline state of the components in this material, as evidenced by two intense and broadened amorphous halos in the region of Bragg angles 2θ = 7–11° and 18–25°. The resulting silicon–carbon powder was subjected to electron irradiation (E = 10 MeV; D = 10⁶–10⁷ Gy). This paper presents the data on the changes in powder properties via IR-Fourier spectroscopy, X-ray phase analysis, and scanning electron microscopy. Irradiation with fast electrons with an absorbed dose of 10⁶ Gy leads to a slight crystallization of the amorphous SiO₂ phase. An increase in the absorbed dose of fast electrons from D = 10⁶ to D = 10⁷ Gy leads to the opposite effect. An amorphization of silica is observed. This study showed the possibility of the crystallization of a silicon–carbon powder without a significant increase in temperature, acting only with electron irradiation. It is necessary to continue further research on expanding the boundaries of the optimal doses of absorbed radiation from fast electrons in order to achieve the maximum effect of the crystallization of silicon–carbon powder.