In-line single-mode tapered-fiber Mach-Zehnder interferometer (MZI-SMTF) with average waist diameters (davg) of 4.05 and 2.89 μm have been fabricated, and both the temperature and the humidity sensitivity of the surrounding media have been measured and compared. The humidity and the temperature were measured over the ranges from 0% to 90% and 28 °C to 40 °C, respectively. The stability of the system at 50%RH and 90%RH was investigated, while the temperature of the chamber was maintained at about 28 °C. The humidity and temperature sensitivity resolution values were 0.02 nm/%RH and 0.05 nm/0.1 °C for the MZI-SMTF-1 with an average waist diameter of 4.05 μm, while they were 0.01 nm/%RH and 0.025 nm/0.1 °C for the MZI-SMTF-2 with an average waist diameter of 2.89 μm.

The feasibility of integrated SU-8 polymeric optical waveguides on a silicon platform was demonstrated experimentally and supported by simulation. Micro-ring resonator (MRR) configurations were designed and fabricated using SU-8 polymer. Simulation is carried out using the finite-difference time-domain method to improve the design. Both the simulation and experimental results confirm that SU-8 can be successfully used in the optical MRR. Passive MMI-coupled SU-8 single coupler and double coupler with a free spectral range of 74.92 GHz is achieved practically and corresponds with the simulation result. Moreover, other important parameters such as the full width at half maximum, Q factor and finesse are calculated from the simulation and practical results to support the feasibility of the SU-8 polymer MRR.