Super-aligned carbon nanotubes (CNTs) film has strong anisotropy to light propagation. In order to better integrate the self-assembled CNTs into microelectromechanical system (MEMS) for polarization applications, some inherent impacts on polarization properties of CNT film were investigated. We described the polarization effects of the film thickness variation in detail, giving an optimum thickness range which is around 700–800 nm. The amorphous carbon content of CNT film was reduced by oxidation process where the transmittance increased by almost 4 folds. The alignment of CNT arrangement was optimized from 0.41 (Chebyshev orientation parameter) to 0.54 by manipulating the C ₂ H ₄ flow rate from 54 to 80 sccm. More specifically, a sample possessing a degree of polarization up to 99% and transmittance over 45% was obtained through proper regulations. The validated optimization makes the aligned CNT films more feasible and valuable for the integration of the CNT polarimeters with MEMS technology.

A micropolarizer array (MPA) that can be integrated into a scientific camera is proposed as a real-time polarimeter that is capable of extracting the polarization parameters. The MPA is based on highly aligned carbon nanotube (CNT) films inspired by their typical anisotropy and selectivity for light propagation over a wide spectral range. The MPA contains a dual-tier CNT pixel plane with 0° and 45° orientations. The thickness of the dual-tier structure of the CNT-based MPA is limited to less than 2 μm with a pixel size of 7.45 μm × 7.45 μm. The degree of polarization of the CNT-MPA reached 93% at a 632 nm wavelength. The specific designs in structure and semiconductor fabrication procedures are described. Compared with customary MPAs, CNT-based MPA holds great potential in decreasing the cross-talk risk associated with lower film thickness and can be extended to a wide spectral range.