Junbo Liu is an Associate Research Fellow at the Institute
of Optics and Electronics, Chinese Academy of Sciences (CAS). He graduated from
the Nanjing University of Science and Technology with a Bachelor’s in 2012 and completed
his Ph.D. at the Institute of Optics and Electronics, CAS, in 2017. He was
elected to the Western Light Talents Program in 2017 and the Youth Innovation
Promotion Association of the Chinese Academy of Sciences in 2020. His main
research areas include photolithography exposure system and test technology,
key technology of projection lithography machines, and computational
lithography technology.
Junbo Liu is an Associate Research Fellow at the Institute
of Optics and Electronics, Chinese Academy of Sciences (CAS). He graduated from
the Nanjing University of Science and Technology with a Bachelor’s in 2012 and completed
his Ph.D. at the Institute of Optics and Electronics, CAS, in 2017. He was
elected to the Western Light Talents Program in 2017 and the Youth Innovation
Promotion Association of the Chinese Academy of Sciences in 2020. His main
research areas include photolithography exposure system and test technology,
key technology of projection lithography machines, and computational
lithography technology.