An optical phased array (OPA) in silicon nitride (SiN) is conspicuously highlighted as a vital alternative to its counterpart in silicon. However, a limited number of studies have been conducted on this array in terms of wavelength-tuned beam steering. A SiN OPA has been proposed and implemented with a grating antenna that incorporated an array of shallow-etched waveguides, rendering wavelength-tuned beam steering along the longitudinal direction. To accomplish a superior directionality on a wavelength-tuned beam steering, the spectral beam emission characteristics of the antenna have been explored from the viewpoint of a planar structure that entails a buried oxide (BOX), a SiN waveguide core, and an upper cladding. Two OPA devices having substantially different thicknesses of the resonant cavities, established by combining the BOX and SiN core, were considered theoretically and experimentally to scrutinize the spectral emission characteristics of the antenna on beam steering. Both of the fabricated OPA devices steered light by an angle of 7.4° along the longitudinal direction for a wavelength ranging from 1530 to 1630 nm, while they maintained a divergence angle of 0.2°×0.6° in the longitudinal and lateral directions. Meanwhile, the OPA fabricated on a substantially thick BOX layer featured a limited steering performance to attain a stabilized response over a broad spectral region. We examined the influence of the cavity thickness on the spectral response of the antenna in terms of optical thickness. Based on the two antenna characteristics, it was confirmed that the grating antenna emitted the beam with a higher efficiency when the optical thickness of the cavity corresponded to odd integer multiples of the quarter wavelength. This work is a considerable strategy for designing a stabilized SiN OPA over a desired spectral region.

Silicon nitride (SiN) optical phased arrays (OPAs) have emerged as a potential alternative to their silicon counterparts, owing to their low nonlinearity, easy scalability, and low propagation loss. However, the development of SiN OPAs for light detection and ranging (LiDAR) applications has attracted less attention due to the low thermo-optic (TO) effect of SiN. Moreover, SiN OPAs are considered to be undesirable for transmitters in LiDAR systems because of the limited longitudinal tuning efficiency of SiN grating antenna. We present a hybrid integrated SiN-polymer OPA for realizing an efficient LiDAR. Owing to the large TO effect of polymer, the proposed OPA with polymeric phase modulators resolves the power dissipation drawback of the SiN devices. The polymeric modulators are integrated with a SiN power splitter and grating antenna, and the coupling loss is alleviated via a spot-size converter. Additionally, a steering angle magnifying lens is used to enhance the tuning efficiency of the antenna, expanding the longitudinal beam steering range. The prepared OPA transmitter equipped with the lens exhibits decent two-dimensional beam steering, featuring stable emission characteristics over a 12° × 30° field of view. With the transmitter, efficient time-of-flight based LiDAR is demonstrated to provide a detection range of 10 m under a peak optical power of 55 dBm. The proposed SiN-polymer OPA is highly anticipated to circumvent the challenges of conventional SiN counterparts and potentially spearhead the development of a prominent OPA platform for advanced LiDAR schemes.

We have proposed and experimentally realized an ultra-compact and broadband silicon nitride edge-coupler that enables high coupling efficiency. The proposed coupler was realized by concatenating short tapers in four stages, whose angles were designed to minimize the footprint while preserving the coupling efficiency. The constituting taper segments were designed by carefully sectioning a long adiabatic taper while adapting to an appropriate taper angle for each segment. The designed coupler exhibited an extremely short footprint of 76 m. A coupling efficiency of 92% was experimentally attained at 1550 nm wavelength when coupled to a single-mode fiber having a mode field diameter of ~4 m. Further, an efficiency of over 90% throughout the C and L bands was observed. A 3-dB bandwidth of 965 nm, spanning =10151980 nm, was achieved in the simulation. Additionally, the fabricated device exhibited an enhanced cleaving tolerance by virtue of its elongated tip, along with relaxed alignment tolerances ranging up to 3.5 m. The proposed design was also found to comply with the waveguides having widths between 1 m and 4 m without affecting the overall footprint and efficiency. This work is anticipated to provide a promising foundation for the development of compact photonic devices.

Solid-state light detection and ranging, capable of performing beam scanning without using any mechanical moving parts, requires a phase-modulator array. Polymers facilitate the fabrication of efficient phase modulators with low drive power, owing to their high thermo-optic (TO) effect and low thermal conductivity. We designed and fabricated a polymeric phase-modulator array and analyzed the temporal response of the TO phase modulator. The frequency response of the phase modulator was measured for a Mach–Zehnder interferometer (MZI), and the transfer function was modeled in terms of multiple poles and zeros. The frequency response of a fabricated beam-scanning device incorporating the TO phase modulator was also measured. The temporal response of the beam scanner was confirmed to coincide well with that of the MZI modulator. The device exhibited a fast rise time of 12 ms, accompanied by slight power variations appearing for a long period (over hundreds of seconds), which originated from the inherent viscoelastic effect of the polymer materials.

A photonic front-end in the 5G wireless network based on wavelength-division multiplexing optical communication requires low-cost tunable transceivers. By exploiting polymer waveguide Bragg-grating technology, we propose a tunable transceiver consisting of an external cavity tunable laser and a tilted grating tunable filter. In particular, a double-reflection tunable filter provides narrower reflection bandwidth and suppresses undesired mode coupling, improving the side-mode suppression ratio (SMSR) and reducing adjacent-channel crosstalk. By introducing perfluorinated polymers with low birefringence, polarization independence, which is a prerequisite for wavelength filter elements, is secured, and 20 dB bandwidth of 0.69 nm, wavelength tunability over 40 nm, and SMSR of 42 dB are achieved.

Silicon nitride (SiN) optical phased arrays (OPAs) have emerged as a potential alternative to their silicon counterparts, due to their potential use in enhanced solid-state light detection and ranging. Grating antennas based on a SiN waveguide suffer from a limited beam steering efficiency, owing to the relatively lower effective refractive index of the waveguide. To mitigate this limitation, we propose and demonstrate a backward-emitting SiN OPA incorporating a reinforced grating vector, which provides efficient wavelength-tuned beam steering along the longitudinal direction. Two backward-emitting OPAs were primarily characterized by their steering efficiency and the spectral emission for the main lobe, and they were compared with a forward-emitting device using a weakened grating vector. The results indicated that strengthening the grating vector for the antenna improved the beam steering efficiency but adversely affected the dependence of its directionality on the wavelength. The directionality was particularly inspected, with respect to major design parameters for the grating antennas, including the pitch and etch depth of a SiN grating, as well as the thickness of a buried oxide and SiN core layer. The proposed backward-emitting OPA scheme is expected to significantly promote its feasibility as an advanced beam scanning device.