An ultra-small integrated photonic temperature sensor has been proposed and demonstrated which incorporates a silicon ring resonator linked to a vertical grating coupler. It was manufactured using a 0.18 μm standard CMOS process, rendering a homogeneous integration into other electrical/optical devices. The temperature variation was measured by monitoring the shift in the resonant wavelength of the silicon resonator, which was induced by the thermo-optic effect and the thermal expansion effect. The dependence of its sensing capability upon the waveguide width of the resonator was intensively probed both theoretically and experimentally. The best achieved sensitivity was about 83 pm/°C for a waveguide width of 500 nm, while the sensitivity was boosted by ~10 pm/°C by adjusting the waveguide width from 300 nm to 500 nm. Finally, the response speed of the sensor was as fast as ~6 μs.
It is advantageous to construct a dielectric metasurface in silicon due to its compatibility with cost-effective, mature processes for complementary metal-oxide-semiconductor devices. However, high-quality crystalline-silicon films are difficult to grow on foreign substrates. In this work, we propose and realize highly efficient structural color filters based on a dielectric metasurface exploiting hydrogenated amorphous silicon (a-Si:H), known to be lossy in the visible regime. The metasurface is comprised of an array of a-Si:H nanodisks embedded in a polymer, providing a homogeneously planarized surface that is crucial for practical applications. The a-Si:H nanodisk element is deemed to individually support an electric dipole (ED) and magnetic dipole (MD) resonance via Mie scattering, thereby leading to wavelength-dependent filtering characteristics. The ED and MD can be precisely identified by observing the resonant field profiles with the assistance of finite-difference time-domain simulations. The completed color filters provide a high transmission of around 90% in the off-resonance band longer than their resonant wavelengths, exhibiting vivid subtractive colors. A wide range of colors can be facilitated by tuning the resonance by adjusting the structural parameters like the period and diameter of the a-Si:H nanodisk. The proposed devices will be actively utilized to implement color displays, imaging devices, and photorealistic color printing.
We present a highly efficient omnidirectional color filter that takes advantage of an Ag-TiO2-Ag nano-resonator integrated with a phase-compensating TiO2 overlay. The dielectric overlay substantially improves the angular sensitivity by appropriately compensating for the phase pertaining to the structure and suppresses unwanted optical reflection so as to elevate the transmission efficiency. The filter is thoroughly designed and it is analyzed in terms of its reflection, optical admittance and phase shift, thereby highlighting the origin of the omnidirectional resonance leading to angle-invariant characteristics. The polarization dependence of the filter is explored, specifically with respect to the incident angle, by performing experiments as well as by providing the relevant theoretical explanation. We could succeed in demonstrating the omnidirectional resonance for the incident angles ranging to up to 70°, over which the center wavelength is shifted by below 3.5% and the peak transmission efficiency is slightly degraded from 69%. The proposed filters incorporate a simple multi-layered structure and are expected to be utilized as tri-color pixels for applications that include image sensors and display devices. These devices are expected to allow good scalability, not requiring complex lithographic processes.
Nanostructured spectral filters enabling dynamic color-tuning are saliently attractive for implementing ultra-compact color displays and imaging devices. Realization of polarization-induced dynamic color-tuning via one-dimensional periodic nanostructures is highly challenging due to the absence of plasmonic resonances for transverse-electric polarization. Here we demonstrate highly efficient dynamic subtractive color filters incorporating a dielectric-loaded aluminum nanowire array, providing a continuum of customized color according to the incident polarization. Dynamic color filtering was realized relying on selective suppression in transmission spectra via plasmonic resonance at a metal-dielectric interface and guided-mode resonance for a metal-clad dielectric waveguide, each occurring at their characteristic wavelengths for transverse-magnetic and electric polarizations, respectively. A broad palette of colors, including cyan, magenta and yellow, has been attained with high transmission beyond 80%, by tailoring the period of the nanowire array and the incident polarization. Thanks to low cost, high durability and mass producibility of the aluminum adopted for the proposed devices, they are anticipated to be diversely applied to color displays, holographic imaging, information encoding and anti-counterfeiting.
Transmission type color filters based on a thin film Ag-SiO2-Ag etalon were built on a quartz substrate, enabling the infrared suppressed transmission and large effective area. They were designed by taking into account the influence of the dispersion characteristics and the thickness of the silver metal. Three different color filters were devised: The cavity length for the red, green and blue filter was 160 nm, 130 nm, and 100 nm respectively, while the metal layer was fixed at 25 nm. The observed spectral pass band was centered at 650 nm, 555 nm, and 480 nm for the red, green, and blue device; the corresponding bandwidth was about 120 nm, 100 nm, and 120 nm; and the peak transmission was all ~60%. For the oblique light incidence the angular dependence of the peak relative transmission was measured to be ~1%/degree. The spectral response of the device was also analyzed for two different polarizations as the tilt angle varied up to 12o, and it was found to be hardly polarization dependent. Finally, as for the positional dependence the relative transmission and the center wavelength were found to vary within 10% and 5 nm respectively over an effective area of 4x4 cm2.