This study introduces two new processes that highly enable PEDOT:PSS (poly(3,4-ethylenedioxythiophene)-poly(styrenesulfonate)) as stable coating material for chronic neural stimulation. In first process, strong mechanical bonding between PEDOT:PSS coating and gold electrodes is achieved by creating rough porous surface with partial iodine etching. PEDOT:PSS coating on iodine etched gold electrode shows 100% stability under strong ultrasonic treatment. The second process represents electrochemical modification of PEDOT:PSS coating by cyclic voltammetry method in Ringer’s solution. This process reduces electrode polarization 33% during stimulation. Therefore, charge injection capacity increases that ensures safe stimulation. A combination of both processes facilitates the use of PEDOT:PSS coating for successful chronic neural recording and stimulation.

This paper presents a highly sensitive thermoelectric sensor for catalytic combustible gas detection. The sensor contains two low-stress (+176 MPa) membranes of a combination of stoichiometric and silicon-rich silicon nitride that makes them chemically and thermally stable. The complete fabrication process with details, especially the challenges and their solutions, is discussed elaborately. In addition, a comprehensive evaluation of design criteria and a comparative analysis of different sensor designs are performed with respect to the homogeneity of the temperature field on the membrane, power consumption, and thermal sensitivity. Evaluating the respective tradeoffs, the best design is selected. The selected sensor has a linear thermal characteristic with a sensitivity of 6.54 mV/K. Additionally, the temperature profile on the membrane is quite homogeneous (20% root mean standard deviation), which is important for the stability of the catalytic layer. Most importantly, the sensor with a ligand (p-Phenylenediamine (PDA))-linked platinum nanoparticles catalyst shows exceptionally high response to hydrogen gas, i.e., 752 mV at 2% concentration.

This paper presents a thermoelectric gas microsensor with improved stability where platinum nanoparticles linked by bifunctional ligands are used as a catalyst. The sensor design provides a homogeneous temperature field over the membrane, an important factor for the long-term stability of the catalyst. A comprehensive study of heat transfer from the chip is performed to evaluate the convection heat loss coefficient and to understand its effect on the homogeneity of the temperature field in a real-time situation. The effect of highly heat-conductive thermopiles is also analyzed by comparing the temperature distribution and power consumption with a thermoresistive sensor of the same dimensions and materials. Despite the thermopiles, the thermoelectric sensor gives better temperature homogeneity and consumes 23% less power than the thermoresistive sensor for 90 °C average temperature on the membrane. A comparative stability analysis among ligand-linked nanoparticles with 5 different ligands and unprotected nanoparticles was done through 3 consecutive 24 h tests under 1.5% continuous hydrogen gas flow. The sensors give very stable output, almost no degradation, through 72 h (3 × 24 h) tests for 3 different ligand-linked nanoparticles. The sensor design provides superb stability to the catalyst: Even catalysts of unprotected nanoparticles withstood more than 24 h and the sensor signal degradation is only 20%.

This paper presents a long-term stable thermoelectric micro gas sensor with ligand linked Pt nanoparticles as catalyst. The sensor design gives an excellent homogeneous temperature distribution over the catalytic layer, an important factor for long-term stability. The sensor consumes very low power, 18 mW at 100 °C heater temperature. Another thermoresistive sensor is also fabricated with same material for comparative analysis. The thermoelectric sensor gives better temperature homogeneity and consumes 23% less power than thermoresistive sensor for same average temperature on the membrane. The sensor shows linear characteristics with temperature change and has significantly high Seebeck coefficient of 6.5 mV/K. The output of the sensor remains completely constant under 15,000 ppm continuous H₂ gas flow for 24 h. No degradation of sensor signal for 24 h indicates no deactivation of catalytic layer over the time. The sensor is tested with 3 different amount of catalyst at 2 different operating temperatures under 6000 ppm and 15,000 ppm continuous H₂ gas flow for 4 h. Sensor output is completely stable for 3 different amount of catalyst.