Only a few iron precursors that can be used in the atomic layer deposition (ALD) of iron oxides have been examined thus far. This study aimed to compare the various properties of FeOx thin films deposited using thermal ALD and plasma-enhanced ALD (PEALD) and to evaluate the advantages and disadvantages of using bis(N,N′-di-butylacetamidinato)iron(II) as an Fe precursor in FeOx ALD. The PEALD of FeOx films using iron bisamidinate has not yet been reported. Compared with thermal ALD films, PEALD films exhibited improved properties in terms of surface roughness, film density, and crystallinity after they were annealed in air at 500 °C. The annealed films, which had thicknesses exceeding ~ 9 nm, exhibited hematite crystal structures. Additionally, the conformality of the ALD-grown films was examined using trench-structured wafers with different aspect ratios.
Social Network Services(SNS) such as Facebook, Friendster, MySpace and Orkut have established themselves as very popular and powerful tools for making and finding friends and for identifying other people who share similar interests. Search behavior of Web users often reflects that of others who have similar interests or similar information profiles in social networks. Therefore, if we locate web users interested in certain topics or areas and then keep track of their preferences in terms of Web search results, we can pinpoint relevant and reliable information about these people in a timely manner In this paper, we present an efficient search system called SMART Finder. This system supports efficient search results for locating people whose social relationships are highly ranked according to specific topics. It can also identify people who are highly associated with each other with regard to Web search topics. Our results are supported by experiments on Orkut and Facebook.