An optoelectronic, integrated system-on-glass for on-chip detection of biomolecules is here presented. The system’s working principle is based on the interaction, detected by a hydrogenated amorphous silicon photosensor, between a monochromatic light travelling in a SU-8 polymer optical waveguide and the biological solution under analysis. Optical simulations of the waveguide coupling to the thin-film photodiode with a specific design were carried out. A prototype was fabricated and characterized showing waveguide optical losses of about 0.6 dB/cm, a photodiode shot noise current of about 2.5 fA/$\sqrt{\mathrm{Hz}}$ and responsivity of 495 mA/W at 532 nm. An electro-optical coupling test was performed on the fabricated device to validate the system. As proof of concept, hemoglobin was studied as analyte for a demonstration scenario, involving optical simulations interpolated with experimental data. The calculated detection limit of the proposed system for hemoglobin concentration in aqueous solution is around 100 ppm, in line with colorimetric methods currently on the market. These results show the effectiveness of the proposed system in biological detection applications and encourage further developments in implementing these kinds of devices in the biomedical field.

This paper presents the analysis and development of an evanescent waveguide sensor system, based on a hydrogenated amorphous silicon (a-Si:H) photodiode and a double ion-exchanged waveguide diffused in a borosilicate BK7 glass substrate. The a-Si:H sensor is a p-doped/intrinsic/n-doped diode, with a metal top electrode and an indium tin oxide (ITO) transparent bottom contact. Simulations on the confinement of a monochromatic light in a channel waveguide and its coupling into a thin-film photodetector were performed using COMSOL Multiphysics. The system design considers a deep investigation on refractive index and thickness of the ITO layer, which are key parameters for the optical coupling optimization between the waveguide and the photodetector. The first prototype was made using standard microelectronics techniques: physical and chemical vapor deposition of the thin films of the structure, wet and dry etching of the different materials, and photolithography for the thin-film pattern definition. The electrooptical characterization of the fabricated device shows the effectiveness of the optical coupling and suggests its use for on-chip detection in lab-on-chip applications.

Optical biosensing systems are commonly developed assembling a source, a light–sample interaction area, and a detector as distinct stand-alone elements. We present a compact, inexpensive, and easy-to-use glass chip that monolithically integrates both the interaction and detection elements in a 1 cm 2 overall surface. The device working principle is based on evanescent wavelight interaction with the complex refractive index of a liquid mixture, being the index influenced by the mixture’s physical and chemical features. We describe the manufacture of a prototype able to perform investigations on food quality and subsequent tests on the detection of fat content in milk. Theoretical investigations are reported as well as measurements performed on samples in the green spectrum. A sensitivity of about 139 fA/(g/dL) and a limit of detection of 14 ppm have been achieved, better than those of current commercial devices.

Due to the SARS-CoV-2 outbreak, wearing a disposable face mask has become a worldwide daily routine, not only for medical operators or specialized personnel, but also for common people. Notwithstanding the undeniable positive effect in reducing the risk of virus transmission, it is important to understand if a prolonged usage of the same face mask can have effectiveness on filtering capability and potential health consequences. To this aim, we present three investigations. A survey, carried out in central Italy, offers an overview of the distorted public awareness of face mask usage. A functional study shows how prolonged wearing leads to substantial drops in humid air filtration efficiency. Finally, a morphological analysis reports the proliferation of fungal or bacteria colonies inside an improperly used mask. Our study highlights therefore that wearing a face mask is really beneficial only if it is used correctly.

This paper presents the development of a multi-hinge, multi-DoF (Degrees of Freedom) nanogripper actuated by means of rotary comb drives and equipped with CSFH (Conjugate Surface Flexure Hinges), with the goal of performing complex in-plane movements at the nanoscale. The design approach, the simulation and a specifically conceived single-mask fabrication process are described in detail and the achieved results are illustrated by SEM images. The first prototype presents a total overall area of (550 × 550) $\mathsf{\mu }$$m^2$, an active clamping area of (2 × 4) $\mathsf{\mu }$$m^2$, 600 nm-wide circular curved beams as flexible hinges for its motion and an aspect ratio of about 2.5. These features allow the proposed system to grasp objects a few hundred nanometers in size.

The evolution of microelectronic technologies is giving constant impulse to advanced micro-scaled systems which perform complex operations. In fact, the actual micro and nano Electro-Mechanical Systems (MEMS/NEMS) easily integrate information-gathering and decision-making electronics together with all sorts of sensors and actuators. Mechanical manipulation can be obtained through microactuators, taking advantage of magnetostrictive, thermal, piezoelectric or electrostatic forces. Electrostatic actuation, more precisely the comb-drive approach, is often employed due to its high versatility and low power consumption. Moreover, the device design and fabrication process flow can be simplified by compliant mechanisms, avoiding complex elements and unorthodox materials. A nano-scaled rotary comb drive is herein introduced and obtained using NEMS technology, with an innovative design which takes advantages of the compliant mechanism characteristics. A theoretical and numerical study is also introduced to inspect the electro-mechanical behavior of the device and to describe a new technological procedure for its fabrication.